Our present knowledge of the atomic scale structural, chemical and electronic properties of semiconductor interfaces is inversely proportional to their importance for a whole generation of novel electronic and photonic quantum well devices. It is the purpose of this paper to demonstrate how wavelength- and time-resolved cathodoluminescence imaging (CLI) provides a one-to-one image of the crystallographic island structure of the heterointerfaces which are the boundaries of the quantum well. A detailed description of the fully computer controlled cathodoluminescence (CL) system is given. The accelerating voltage, which is choosen to be 30 kV in our standard CL work, is lowered to 3 kV in order to reduce the diameter of the carrier generation volume resulting in an increase of the lateral CL resolution. The exciting electron beam is digitally scanned over a sample area divided in up to 512 x 400 pixels. The CL signal is detected in the visible and near infrared regime (GaAs quantum wells) by a cooled photomultiplier using the technique of time resolved single photon counting. The total time resolution is better than 250 ps. Our data acquisition technique has the unique advantage that simultaneously up to 14 time Windows can be activated, enabling us to record up to 14 spectra or up to 14 images corresponding to different times with respect to the start of the exciting pulse in a single run. Results on AlGaAs/GaAs/AlGaAs quantum wells are presented as a typical example. Direct images of growth islands differing by one monolayer height (2.8 A) at GaAs/AlGaAs heterointerfaces and of the columnar structure of GaAs QWs are observed. The dependence of the lateral extension of these islands, which for certain growth conditions exceeds 6-7 µm, on the parameters of crystal growth is investigated. A transition from 2 dimensional to 3 dimensional crystal growth due to an increase of the MBE (molecular beam epitaxy) growth temperature from 600° C to 660° C is clearly observed. Spectrally- and time-resolved CLI experiments directly visualize the lateral diffusion of the quasi two dimensional carriers along the quantum well interfaces and provide a measure of the in-plane diffusion velocity in quantum well structures. The CLI detection setup is further extended to the infrared regime, by adapting a Ge-PIN-diode and avalanche photodiodes to the photon counting System. This enables CLI and time resolved CLI investigation of InGaAs quantum wells and related material Systems. Strain induced dislocations in pseudomorphic strained layer quantum wells (e.g. GaAs/InGaAs/GaAs QWs) are directly visualized by infrared CLI. Time resolved experiments yield lifetime images around these dislocations.
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