Copper phthalocyanine(CuPc), a widely-used semiconducting material, was deposited onto quarts substrates via a vacuum process. SEM and XRD analysis were employed to characterize the structure-controlled CuPc films. As-deposited CuPc thin films were weakly oriented according to the XRD result and were homogeneous. The conductivity of CuPc film was estimated using four-point probe measurement technique and the values of the conductivity were 8.0 × 10−8– 3.5 × 10−7Ω−1cm−1. It was observed that thermal annealing under UV irradiation could make CuPc film well-aligned since UV irradiation could participate to increase the interaction among the CuPc molecules and between the CuPc molecule and the surface of the substrate leading to closer stacking of CuPc molecules. For well-aligned CuPc thin films, the threshold voltage in I-V characteristics of the ITO/CuPc/Al device was decreased by 20%compared to as-deposited CuPc films.
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