MEMS Scanner Research Articles

Opto2P-FCM: A MEMS based miniature two-photon microscope with two-photon patterned optogenetic stimulation.

Multiphoton microscopy combined with optogenetic photostimulation is a powerful technique in neuroscience enabling precise control of cellular activity to determine the neural basis of behavior in a live animal. Two-photon patterned photostimulation has taken this further by allowing interrogation at the individual neuron level. However, it remains a challenge to implement imaging of neural activity with spatially patterned two-photon photostimulation in a freely moving animal. We developed a miniature microscope for high resolution two-photon fluorescence imaging with patterned two-photon optogenetic stimulation. The design incorporates a MEMS scanner for two-photon imaging and a second beam path for patterned two-photon excitation in a compact and lightweight design that can be head-attached to a freely moving animal. We demonstrate cell-specific optogenetics and high resolution MEMS based two-photon imaging in a freely moving mouse. The new capabilities of this miniature microscope design can enable cell-specific studies of behavior that can only be done in freely moving animals.

Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Magnetic field density concentrated permanent magnet structure for electromagnetic MEMS scanning mirror

The study investigates the inadequacy of driving torque in large-diameter Micro-electro Mechanical Systems Electromagnetic Scanning Mirrors (MEMS-ESM) and introduces fresh insights into the power efficiency of traditional MEMS-ESM devices. A novel permanent magnet structure (PMS) and driving principle are devised, drawing upon the phenomenon of concentrated magnetic field density and a custom-designed PMS inner profile. In comparison to L-shaped and I-shaped PMSs, the proposed PMS delivers up to 3.48 times and 3.76 times greater driving torque within the same form factor. Moreover, the optimized proposed PMS has been experimentally proven to reduce power consumption by 53.3% and 81.4% and reduce total driving current by 31.3% and 55.0%, making it the sole solution that conforms to the safe current range. Additionally, the research analyzes the impact of variations in the optical scanning angle on the optimal PMS design. It is noteworthy that the proposed PMS enables the substitution of L-type and I-type PMSs with smaller package sizes, all while preserving torque, thus promoting the miniaturization of MEMS-SM.

Feedback signal detection and drive signal compensation for electromagnetic MEMS scanning mirror based on FPGA

Feedback signal detection and drive signal compensation for electromagnetic MEMS scanning mirror based on FPGA

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination.

This study introduces a novel image capture and lighting techniques using a cutting-edge hybrid MEMS scanner system designed for compact microscopic imaging. The scanner comprises a tapered optical fiber waveguide and innovative aerosol-jet printed PZT (lead zirconate titanate) bimorph push-pull actuators on a stainless-steel substrate, effectively addressing issues that are commonly associated with PZT on silicon substrates such as fracture and layer separation. By leveraging nonlinear vibration, the scanner achieves a spiral scan pattern from a single signal input, in addition to the expected two-dimensional scanning and target illumination from two phase-shifted inputs. This capability is further enhanced by a novel process to taper the optical fiber, which reduces illumination scattering and tunes the fiber to the resonant frequencies of the scanner. The precisely tapered tip enables large fields of view while maintaining independent 2-axis scanning through one-degree-of-freedom actuation. Experimental validation showcases the successful generation of a spiral scan pattern with a 60 μm diameter scan area and a 10 Hz frame rate, effectively reconstructing scanned images of 5 μm lines, cross patterns (15 μm in length with a 5 μm gap), and structures of a Psychodidae wing.

Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors

Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors

Piezoelectric 1D MEMS scanning micromirror fabricated with bulk PZT laminated on stainless steel plate

In this research, a piezoelectric metal scanning micromirror with a large reflective surface area is presented. Unlike conventional scanning micromirrors fabricated with single-crystal silicon, stainless steel plate is used as the structural layer material. Two distinct device models, varying in cantilever and connector geometry, were conceptualized and experimentally assessed. These fabricated devices utilized the strain induced in bulk PZT (lead zirconate titanate) plates affixed to the cantilevers on opposing sides of the reflective surface. A 5 mm-diameter gold-coated silicon mirror plate served as the reflective surface. We evaluated the performance of two bulk PZT plates, PZT-5H and PZT-8. Our experimental results reveal that model #1, driven by PZT-5H with a sinusoidal input voltage of 200 Vpp, achieved a maximum optical scan angle of 26°, while model #2 exhibited a more substantial maximum scan angle of 44°. The average resonant frequency of the PZT-5H samples was 1264 Hz for model #1 and 995 Hz for model #2. These findings underscore the viability of stainless steel plates as a robust structural layer for piezoelectric scanning micromirrors. The proposed design holds potential for integration into a 3D LiDAR system when combined with an additional slow vertical scanner.

Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners

This paper presents the thermal behavior of non-resonant (quasi-static) piezoelectric biaxial MEMS scanners with Bragg reflectors. These scanners were developed for LIDAR (LIght Detection And Ranging) applications using a pulsed 1550 nm laser with an average power of 2 W. At this power, a standard metal (gold) reflector can overheat and be damaged. The Bragg reflector developed here has up to 24 times lower absorption than gold, which limits heating of the mirror. However, the use of such a reflector involves a technological process completely different from that used for gold and induces, for example, different final stresses on the mirror. In view of the high requirements for optical power, the behavior of this reflector in the event of an increase in temperature needs to be studied and compared with the results of previous studies using gold reflectors. This paper shows that the Bragg reflector remains functional as the temperature rises and undergoes no detrimental deformation even when heated to 200 °C. In addition, the 2D-projection model revealed a 5% variation in optical angle at temperatures up to 150 °C and stability of 2D scanning during one hour of continuous use at 150 °C. The results of this study demonstrate that a biaxial piezoelectric MEMS scanner equipped with Bragg reflector technology can reach a maximum temperature of 150 °C, which is of the same order of magnitude as can be reached by scanners with gold reflectors.

Lissajous MEMS laser beam scanner with uniform and high fill-factor projection for augmented reality display.

MEMS Laser beam scanning (LBS) has been identified as a key advancement for augmented reality (AR) displays due to its ability to create compact optical systems that generate bright, high-contrast images with minimal heat dissipation. This innovation can be attributed to the focus-free, efficient light-on-demand pixel projection mechanisms integral to LBS. The LBS, specifically in Lissajous-mode, outperforms the raster-mode in terms of larger scan angles and stability to external vibrations, by leveraging a MEMS mirror operating at bi-axial resonance. However, it tends to be hampered by small mirror aperture, low fill-factor, and inconsistent uniformity of image projection. In this research, a unique gimbal-less Lissajous MEMS scanner was proposed. It employs a bi-axial high frequency of 12,255 Hz and 7,182 Hz to achieve a resolution of 640 × 360 pixels and a video refresh rate of 57 Hz, all while maintaining a high image fill factor of 85.11%. The robust structure of the mirror is proven to sustain stable scanning under broad spectrum of external vibration disturbance up to 2,000 Hz. Furthermore, the large mirror diameter of 2 mm improves refined pixel projection and increased optical etendue for exit pupil. Mathematic model of Lissajous pixel-cells and image reconstruction simulation were established to validate the LBS's ability to generate a uniform and densely pixelated visual effect that fits for typical AR head-up display (AR-HUD). In a pioneering move, performance metric of figure-of-merit was defined to evaluate AR light-engines using varied picture-generation techniques, laying a foundation for guiding future AR system development.

A MEMS Mirror-Based Confocal Laser Endomicroscope with Image Distortion Correction

Scanning MEMS mirrors can extend confocal laser microscopy into endoscopic applications, but the practical use of MEMS mirror-based confocal endomicroscopy is hindered partially by various image distortions such as barrel, fan-shaped and nonlinear distortions. In this work, the nonlinear scanning behaviors of an electrothermal MEMS mirror are analyzed and incorporated into an optical scanning model that takes all these three types of distortions into account. The model generates a 2D spatial mapping that can be applied to correct all of the image distortions in one step without a calibration board. To experimentally validate this method, a confocal laser endomicroscope employing a two-axis scanning electrothermal MEMS micromirror is designed and constructed, and confocal fluorescence images of a patterned micro-structure are obtained with the MEMS endomicroscope. The results show that the overall image distortion is reduced by at least one order of magnitude in the length direction.

Research of Non-mechanical Beam Scanning Technology

Laser beam scanning technology has been widely used in various fields such as LIDAR, photoelectric detection and space optical communication, etc. Mechanical scanning has problems such as inflexibility and low scanning rate. This paper introduces the basic principles of acoustic-optical scanning, electro-optical scanning, optical phased array and MEMS scanning, and analyses the advantages and disadvantages of several scanning methods and the main application scenarios, and finds that the current optical scanning technology is developing towards large scanning angle, high accuracy, fast response and miniaturization, among which the liquid crystal optical phased array and MEMS scanning technology are relatively mature. The scanning angle of the LCD optical phased array can reach ±10°, and the scanning angle of the MEMS can reach 6.6°*4.4°, which has a broad development prospect.

Super-twisting Sliding Mode Control Based on Electrostatic MEMS Micromirror Scanning

In this paper, a Super-twisting sliding-mode control method based on a nonlinear interference observer is proposed for the external perturbation of MEMS micromirrors during beam scanning. Developing a physical model of electrostatic MEMS micromirror, the Super-twisting sliding-mode control algorithm based on nonlinear interference observer is applied to the electrostatically driven MEMS scanning micromirror with side electrodes, with the demonstration on stability of the control system by Lyapunov theory. The method effectively improves the anti-disturbance performance of the system. The simulation results show that the Super-twisting sliding mode control method based on nonlinear disturbance observer can effectively enhance the disturbance inhibition of the system.

Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large Dynamic Range

This research discusses the challenges in implementing a fully electrical closed-loop control system for high-end applications of quasi-static microscanners, accounting at the same time for wide aperture, high-accuracy and wide-bandwidth. The discussion highlights how not only the ringing of the main mode, but also the presence of spurious modes and nonlinearity, impact the closed loop stability and accuracy. A novel control approach based on nested loops is conceived and implemented in the digital domain in a mixed-signal application-specific integrated circuit (ASIC). The developed versatile ASIC is designed to be coupled to different types of micromirrors, with fundamental frequency ranging from few hundred Hz to few kHz, by simply adjusting coefficients in the digital domain. The ASIC is here successfully operated with two micromirrors and results demonstrate saw-tooth position control at 28-32 deg field of view and up to 120 Hz refresh rate, while holding at the same time a tilt angle resolution of 25 mdeg r.m.s. (dynamic range of 60 dB) and a linearity error below 1%

Development of Pure Torsion Test System for Micro Torsion Bars

MEMS scanners use micro torsion bars made of single crystal silicon. The push-in method is used to measure the mechanical properties of these micro torsion bars, in which a lever connected to the torsion bar is pushed. In the push-in method, the sliding force increases as the indentation amount increases, decreasing measurement accuracy. As a method to reduce the sliding force, we proposed to generate pure torsion in the torsion bar section by rotating a sample holder with a test sample attached. The proposed method can maintain the load detection axis of the load cell and the lever part at almost a right angle regardless of the degree of torsional angle, preventing slip at the contact point between the load cell and the lever part. The torsional spring constants of test samples were obtained and compared by three different methods: a testing system using this principle, a resonance frequency method, and a theoretical calculation. The accuracy of the developed testing system is -17.5 % to 12.7 % of the measurement error compared to the torsion beam spring constant obtained from the resonance frequency, and -15.6 % to 7.2 % compared to the theoretical calculation value, thus verifying the effectiveness of the proposed test method.

On the design of piezoelectric actuator for 1D MEMS scanning mirror applications

This study presents the design, implementation, and characterization of 1D resonant type micro-electro-mechanical-systems (MEMS) piezoelectric scanning mirrors with different actuator designs to investigate their influences on the figure of merits (FoMs) for automotive light detection and ranging application. The MEMS scanning mirrors are driven by lead zirconate titanate (PZT) thin film in this study owing to its outstanding piezoelectric properties. Three different beam-type piezoelectric actuators are designed, including the reference meander straight-beam actuator design, and the proposed meander curved-beam and straight-curved tapered beam actuator designs. Simulations show the scan angle enhancement for two proposed designs, yet the resonant scanning frequency of meander curved-beam design dropped to below the 2 kHz requirement. To evaluate the designs, scanning mirrors with two proposed actuators are fabricated and tested. Measurements show that the resonant frequencies for the two proposed MEMS scanning mirrors are 1735 Hz and 2578 Hz, respectively. Two proposed designs respectively have the maximum optical angles of 48.1° and 50.6° at the 20 Vpp driving voltage. Due to the much higher stress on the beam structure induced by the misalignment of PZT film, the actuator could not reach the predicted scanning angle of near 80°. In comparison of the two proposed designs, the straight-curved tapered beam actuator design could enhance the FoM for about 56%. In summary, the performances of piezoelectric MEMS scanning mirror can be improved by varying the designs of length and shape of actuator, and the distribution of PZT film on the suspended actuator is also a critical design concern.

On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle

This study designs and implements the piezoelectric MEMS scanning mirror with large scan angle and reflection area for light beam manipulating applications. In this design, the scanning mirror has a large mirror plate (3 mm in diameter) supported by two T-shape torsional springs. The U-shape piezoelectric cantilever acts as the actuator to drive the scanning mirror through the transmission spring. The analytical model is established to provide the design guideline of transmission spring to increase the scan angle. In application, the proposed designs are fabricated on the SOI (silicon on insulator) wafer deposited with the PZT film. Measurements indicate the fabricated mirror could reach an optical scan angle of 140-degree (mechanical scan angle of ±35-degree) when driving at its resonant frequency of 1.5 kHz with a unipolar driving voltage of 42 V. Moreover, no vacuum environment is required for the presented scanning mirror to achieve the above scan angle. This is an extremely large optical scan angle for the MEMS scanner with a mirror plate of 3 mm in diameter. In addition, another U-shape piezoelectric cantilever serves as the position sensor to detect the scan angle of mirror plate. The sensing signals show good linearity with the scan angles and can be exploited as the feedback control. Measurements also demonstrate that the micro scanner could withstand 1500 g shock loading, and the deviation of scan angle is less than 10% after the cycling test under 10 V pp resonant driving in 95%RH and room temperature for 0.2 billion cycles.

Cold-atom shaping with MEMS scanning mirrors.

We demonstrate the integration of micro-electro-mechanical-systems (MEMS) scanning mirrors as active elements for the local optical pumping of ultra-cold atoms in a magneto-optical trap. A pair of MEMS mirrors steer a focused resonant beam through a cloud of trapped atoms shelved in the F = 1 ground-state of 87Rb for spatially selective fluorescence of the atom cloud. Two-dimensional control is demonstrated by forming geometrical patterns along the imaging axis of the cold atom ensemble. Such control of the atomic ensemble with a microfabricated mirror pair could find applications in single atom selection, local optical pumping, and arbitrary cloud shaping. This approach has significant potential for miniaturization and in creating portable control systems for quantum optic experiments.

On-Chip Frequency Tuning of Fast Resonant MEMS Scanner

The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan angles of 10° and 6° for two orthogonal movement modes with 40 V actuation. On-chip frequency tuning is achieved through electrothermal actuators fabricated adjacent to the mirror main suspension. The electrothermal actuators produce a global and local temperature increase which changes the suspension stiffness and therefore the resonant frequency. A resonance frequency tuning range of up to 5.5 kHz is achieved, with tuning dominant on only one of the two orthogonal scan movement modes. This opens the possibility for precise tuning of a 2D Lissajous scan pattern using a single resonant MEMS scanner with dual orthogonal resonant modes producing full frame update rates up to 20 kHz while retaining the full angular range of both resonant movement modes.

Confocal laser endomicroscope with distal MEMS scanner for real-time histopathology

Confocal laser endomicroscopy is an emerging methodology to perform real time optical biopsy. Fluorescence images with histology-like quality can be collected instantaneously from the epithelium of hollow organs. Currently, scanning is performed at the proximal end of probe-based instruments used routinely in the clinic, and flexibility to control the focus is limited. We demonstrate use of a parametric resonance scanner packaged in the distal end of the endomicroscope to perform high speed lateral deflections. An aperture was etched in the center of the reflector to fold the optical path. This design reduced the dimensions of the instrument to 2.4 mm diameter and 10 mm length, allowing for forward passage through the working channel of a standard medical endoscope. A compact lens assembly provides lateral and axial resolution of 1.1 and 13.6 μm, respectively. A working distance of 0 μm and field-of-view of 250 μm × 250 μm was achieved at frame rates up to 20 Hz. Excitation at 488 nm was delivered to excite fluorescein, an FDA-approved dye, to generate high tissue contrast. The endomicroscope was reprocessed using a clinically-approved sterilization method for 18 cycles without failure. Fluorescence images were collected during routine colonoscopy from normal colonic mucosa, tubular adenomas, hyperplastic polyps, ulcerative colitis, and Crohn’s colitis. Individual cells, including colonocytes, goblet cells, and inflammatory cells, could be identified. Mucosal features, such as crypt structures, crypt lumens, and lamina propria, could be distinguished. This instrument has potential to be used as an accessory during routine medical endoscopy.

Online Optimization Control With Predictive Gradient Descent for MEMS Micro-Mirrors

In this article, an online optimization control scheme is proposed for the angle control of MEMS scanning micromirror actuated via electromagnetic method. In order to avoid complicated process of building precise model of the MEMS micromirror, a control structure not relying on precise model is developed. In this structure, a simplified linear dynamic model is used to describe the basic dynamic behavior of the micromirror. Then, a model error compensation mechanism is introduced to compensate for the model uncertainty caused by unmodeled dynamics and nonlinear factors, such as hysteresis. Moreover, a predictive gradient descent based optimization mechanism is proposed to compensate the effect of time-delay and speed up the convergence of online optimization process. Then, the stability analysis of the proposed control system is implemented. Finally, the proposed control scheme is applied to the angle control of electromagnetically driven scanning micromirror and the corresponding experimental results are presented.