Abstract
This research discusses the challenges in implementing a fully electrical closed-loop control system for high-end applications of quasi-static microscanners, accounting at the same time for wide aperture, high-accuracy and wide-bandwidth. The discussion highlights how not only the ringing of the main mode, but also the presence of spurious modes and nonlinearity, impact the closed loop stability and accuracy. A novel control approach based on nested loops is conceived and implemented in the digital domain in a mixed-signal application-specific integrated circuit (ASIC). The developed versatile ASIC is designed to be coupled to different types of micromirrors, with fundamental frequency ranging from few hundred Hz to few kHz, by simply adjusting coefficients in the digital domain. The ASIC is here successfully operated with two micromirrors and results demonstrate saw-tooth position control at 28-32 deg field of view and up to 120 Hz refresh rate, while holding at the same time a tilt angle resolution of 25 mdeg r.m.s. (dynamic range of 60 dB) and a linearity error below 1%
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