MEMS Scanner Research Articles

High-speed optical resolution photoacoustic microscopy with MEMS scanner using a novel and simple distortion correction method

Optical resolution photoacoustic microscopy (OR-PAM) is a remarkable biomedical imaging technique that can selectively visualize microtissues with optical-dependent high resolution. However, traditional OR-PAM using mechanical stages provides slow imaging speed, making it difficult to biologically interpret in vivo tissue. In this study, we developed a high-speed OR-PAM using a recently commercialized MEMS mirror. This system (MEMS-OR-PAM) consists of a 1-axis MEMS mirror and a mechanical stage. Furthermore, this study proposes a novel calibration method that quickly removes the spatial distortion caused by fast MEMS scanning. The proposed calibration method can easily correct distortions caused by both the scan geometry of the MEMS mirror and its nonlinear motion by running an image sequence only once using a ruler target. The combination of MEMS-OR-PAM and distortion correction method was verified using three experiments: (1) leaf skeleton phantom imaging to test the distortion correction efficacy; (2) spatial resolution and depth of field (DOF) measurement for system performance; (3) in-vivo finger capillary imaging to verify their biomedical use. The results showed that the combination could achieve a high-speed (32 s in 2 × 4 mm) and high lateral resolution (~ 6 µm) imaging capability and precisely visualize the circulating structure of the finger capillaries.

Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System.

MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.

Handheld laser scanning microscope catheter for real-time and in vivo confocal microscopy using a high definition high frame rate Lissajous MEMS mirror.

A handheld confocal microscope using a rapid MEMS scanning mirror facilitates real-time optical biopsy for simple cancer diagnosis. Here we report a handheld confocal microscope catheter using high definition and high frame rate (HDHF) Lissajous scanning MEMS mirror. The broad resonant frequency region of the fast axis on the MEMS mirror with a low Q-factor facilitates the flexible selection of scanning frequencies. HDHF Lissajous scanning was achieved by selecting the scanning frequencies with high greatest common divisor (GCD) and high total lobe number. The MEMS mirror was fully packaged into a handheld configuration, which was coupled to a home-built confocal imaging system. The confocal microscope catheter allows fluorescence imaging of in vivo and ex vivo mouse tissues with 30 Hz frame rate and 95.4% fill factor at 256 × 256 pixels image, where the lateral resolution is 4.35 μm and the field-of-view (FOV) is 330 μm × 330 μm. This compact confocal microscope can provide diverse handheld microscopic applications for real-time, on-demand, and in vivo optical biopsy.

Design of three-dimensional imaging lidar optical system for large field of view scanning

Three-dimensional (3D) lidar has been widely used in various fields. The MEMS scanning system is one of its most important components, while the limitation of scanning angle is the main obstacle to improve the demerit for its application in various fields. In this paper, a folded large field of view scanning optical system is proposed. The structure and parameters of the system are determined by theoretical derivation of ray tracing. The optical design software Zemax is used to design the system. After optimization, the final structure performs well in collimation and beam expansion. The results show that the scan angle can be expanded from ±5° to ±26.5°, and finally the parallel light scanning is realized. The spot diagram at a distance of 100 mm from the exit surface shows that the maximum radius of the spot is 0.506 mm with a uniformly distributed spot. The maximum radius of the spot at 100 m is 19 cm, and the diffusion angle is less than 2 mrad. The energy concentration in the spot range is greater than 90% with a high system energy concentration, and the parallelism is good. This design overcomes the shortcoming of the small mechanical scanning angle of the MEMS lidar, and has good performance in collimation and beam expansion. It provides a design method for large-scale application of MEMS lidar.

System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors

We present the design and system integration of a hybrid MEMS scanning mirror (MSM) array developed for real-time three-dimensional imaging with a panoramic optical field of view (FOV) of 360 deg × 60 deg (horizontal × vertical). The pulsed time-of-flight light detection and ranging (LiDAR) system targets a distance measurement range of 100 m with a video-like frame rate of 10 Hz. The fast vertical scan axis is realized by a synchronous scanning MSM array with large receiver aperture. It increases the scanning rate to 3200 Hz, which is four times faster in comparison with state-of-the-art fast macroscopic polygon scanning systems used in current LiDAR systems. A hybrid assembly of frequency selected scanner elements was chosen instead of a monolithic MEMS array to guaranty high yield of MEMS fabrication and a synchronous operation of all resonant MEMS elements at 1600 Hz with large FOV of 60 deg. The hybrid MSM array consists of a separate emitting mirror for laser scanning of the target and 22 reception elements resulting in a large reception aperture of Deff = 23 mm. All MSM are driven in parametric resonance to enable a fully synchronized operation of all individual MEMS scanner elements. Therefore, piezoresistive position sensors are integrated inside the MEMS chip, used for position feedback of the driving control. We focus on the MEMS system integration including the microassembly of multiple MEMS scanning elements using micromechanical self-alignment. We present technical details to meet the narrow tolerance budgets for (i) microassembly and (ii) synchronous driving of multiple MEMS scanner elements.

Design and Realization of Wide Field-of-View 3D MEMS LiDAR

Light detection and ranging (LiDAR) sensors are promising for automated transportation to detect the surrounding environment. However, most LiDAR solutions are complex and bulky. By designing a MEMS-mirror-based LiDAR, we can improve the volume constraints, but MEMS mirrors could limit scanning angles. In this work, we simulated and demonstrated a MEMS LiDAR system to solve the current obstacles. Combining a MEMS mirror and a wide-angle lens into the system, small-volume and large field-of-view (FOV) LiDAR systems can be realized. We use ray tracing optical simulation software to design a pair of aspherical lenses to expand the scanning angle. After the laser beam passes through the wide-angle lens, the FOV can be increased to 104 degrees. The distortion of the wide-angle lens is controlled below 3%, making the scanned image precise to the actual situation. In order to experimentally demonstrate the small-volume MEMS scanning LiDAR, a modular laser rangefinder is used with a MEMS mirror. The entire system of the LiDAR scanner is around 15 cm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times5$ </tex-math></inline-formula> cm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times2.5$ </tex-math></inline-formula> cm. In the natural light environment for wide-angle LiDAR measurement, the maximum error is less than 2%. Finally, an image processing program is written to convert the scanned data into a 3D point cloud image, and the generated image proves the complete function of the proposed LiDAR.

MEMS-Scanner Testbench for High Field of View LiDAR Applications

LiDAR sensors are a key technology for enabling safe autonomous cars. For highway applications, such systems must have a long range, and the covered field of view (FoV) of >45° must be scanned with resolutions higher than 0.1°. These specifications can be met by modern MEMS scanners, which are chosen for their robustness and scalability. For the automotive market, these sensors, and especially the scanners within, must be tested to the highest standards. We propose a novel measurement setup for characterizing and validating these kinds of scanners based on a position-sensitive detector (PSD) by imaging a deflected laser beam from a diffuser screen onto the PSD. A so-called ray trace shifting technique (RTST) was used to minimize manual calibration effort, to reduce external mounting errors, and to enable dynamical one-shot measurements of the scanner’s steering angle over large FoVs. This paper describes the overall setup and the calibration method according to a standard camera calibration. We further show the setup’s capabilities by validating it with a statically set rotating stage and a dynamically oscillating MEMS scanner. The setup was found to be capable of measuring LiDAR MEMS scanners with a maximum FoV of 47° dynamically, with an uncertainty of less than 1%.

Dynamic wavefront distortion in resonant scanners.

Dynamic mirror deformation can substantially degrade the performance of optical instruments using resonant scanners. Here, we evaluate two scanners with resonant frequencies >12kHz with low dynamic distortion. First, we tested an existing galvanometric motor with a novel, to the best of our knowledge, mirror substrate material, silicon carbide, which resonates at 13.8 kHz. This material is stiffer than conventional optical glasses and has lower manufacturing toxicity than beryllium, the stiffest material currently used for this application. Then, we tested a biaxial microelectromechanical (MEMS) scanner with the resonant axis operating at 29.4 kHz. Dynamic deformation measurements show that wavefront aberrations in the galvanometric scanner are dominated by linear oblique astigmatism (90%), while wavefront aberrations in the MEMS scanner are dominated by horizontal coma (30%) and oblique trefoil (27%). In both scanners, distortion amplitude increases linearly with deflection angle, yielding diffraction-limited performance over half of the maximum possible deflection for wavelengths longer than 450 nm and over the full deflection range for wavelengths above 850 nm. Diffraction-limited performance for shorter wavelengths or over larger fractions of the deflection range can be achieved by reducing the beam diameter at the mirror surface. The small dynamic distortion of the MEMS scanner offers a promising alternative to galvanometric resonant scanners with desirable but currently unattainably high resonant frequencies.

Laser heterodyne based stress measurement technology for optical elements

Common stress measurement methods of optical elements often suffering from complex process and limited aperture. To meet this challenge a new method based on laser heterodyne technology is proposed. In this method the stress measurement is transformed into the measurement of optical path difference induced by birefringence according to the stress birefringence effect, and the signal light is demodulated by laser heterodyne detection. This method has simple measurement process, and solves the problem of large-aperture measurement by combining with MEMS scanning technology. The basic structure of the measurement system is established, and its theoretical model is derived in detail. The experiment result of a fused silica sample with thickness of 2 mm reach an accuracy as high as 1.8 kPa, and the relative error is less than 0.01%.

Resonant scanning design and control for fast spatial sampling

Two-dimensional, resonant scanners have been utilized in a large variety of imaging modules due to their compact form, low power consumption, large angular range, and high speed. However, resonant scanners have problems with non-optimal and inflexible scanning patterns and inherent phase uncertainty, which limit practical applications. Here we propose methods for optimized design and control of the scanning trajectory of two-dimensional resonant scanners under various physical constraints, including high frame-rate and limited actuation amplitude. First, we propose an analytical design rule for uniform spatial sampling. We demonstrate theoretically and experimentally that by expanding the design space, the proposed designs outperform previous designs in terms of scanning range and fill factor. Second, we show that we can create flexible scanning patterns that allow focusing on user-defined Regions-of-Interest (RoI) by modulation of the scanning parameters. The scanning parameters are found by an optimization algorithm. In simulations, we demonstrate the benefits of these designs with standard metrics and higher-level computer vision tasks (LiDAR odometry and 3D object detection). Finally, we experimentally implement and verify both unmodulated and modulated scanning modes using a two-dimensional, resonant MEMS scanner. Central to the implementations is high bandwidth monitoring of the phase of the angular scans in both dimensions. This task is carried out with a position-sensitive photodetector combined with high-bandwidth electronics, enabling fast spatial sampling at sim 100 Hz frame-rate.

A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications

A forward-view optical scanner made of a MEMS mirror typically needs a second mirror to fold the optical beam forward, and thus an assembly structure is required, which drastically increases the overall size and weight of the scanner. This paper reports an ultra-small forward-view optical scanner with two vertically oriented micromirrors integrated on a silicon optical bench (SiOB). A new latch structure is proposed to secure the mirror frame at its vertical position and an array of meander thin-film stripes is designed to assist the latching process. The new design has been successfully fabricated and shows much-improved verticality with a maximum deviation of less than ±2° from 90°. With an optical aperture of 0.7 mm, the form factor of the MEMS chip is 4.9 mm (length) by 4.7 mm (width) by 1.8 mm (height). The measured forward field of view (FoV) of the vertical micromirrors reaches 21° in both axes at non-resonance with the voltage amplitude less than 4 V. The first resonant frequency (corresponding to the mirror frame rotation mode) of the micromirror is about 630 Hz. A fiber-pigtail bonded forward scanner is assembled with a footprint of 2 cm by 1.2 cm and a weight of 0.6 g. A forward scanning LiDAR has been built with this new MEMS scanner. The non-resonant scanning capability enables forward-view adaptive resolution and zoom-in scanning capability. [2021-0132]

Self-sensing control of resonant MEMS scanner by comb-drive current feedback

This paper proposes a novel self-sensing control concept for resonant MEMS mirrors solely based on the comb-drive current generated by the mirror movement and simple circuitry. Phase errors are immediately compensated by asynchronous switching of the driving voltage using the precise zero crossing detection by the steep current gradient. The mirror amplitude is detected based on the time difference between a comparator threshold crossing of the current signal and the zero crossing of the mirror, while it is controlled by the duty cycle of the driving voltage signal. The proper threshold setting is analyzed regarding the obtained sensitivity and uncertainty of the amplitude detection and is verified by measurements. It is found that even for symmetric out-of-plane comb-drives the scanning direction can be determined utilizing the mode coupling phenomenon of a lightweight MEMS mirror design with reinforcement structure. Experiments show that the proposed control concept results in a low optical pointing uncertainty of 0.52mdeg, which allows 10000 pixels with a precision of 10 sigma at a scanning frequency of 2kHz. Thus a lightweight and simple design of a high performance MEMS mirror is precisely controlled in its oscillation without any additional sensors or complex circuitry.

Feedforward Control Algorithms for MEMS Galvos and Scanners

Optical systems typically use galvanometers (galvos) and scanners. Galvos move, quasi-statically, from one static position to another. Scanners move in an oscillatory fashion, typically at the device resonant frequency. MEMS devices, which have many advantages and are often used in optical systems, are typically high Q devices. Moving from one position to another for a galvo or one amplitude to another for scanners, can take many periods to settle following the ring down. During these transitions, the optical system is inactive. Here, we show how precisely timed pulses can be used (in an open loop manner) to begin or end scanner motion without ring up/ring down time. The size of pulse required is found to depend on the Q of the device, and relationships are derived. The pulse can also be separated into multiple pulse spaced one period apart if pulses of the necessary size are not possible due to constraints of the physical device. For finite Q scanners, the amplitude decreases after the initial pulse due to damping. This can be eliminated by applying an excitation at the frequency of the scanner. The necessary amplitude for this excitation is derived. Finally, by combining this open loop control algorithm with an open loop control algorithm for galvo motion the device can seamlessly move between scanner and galvo functioning. These control algorithms are demonstrated using computer simulations, analytical models and a commercially available MEMS mirror (Mirrorcle Technologies, A8L2.2).

49.4: Long Viewing Distance and Large Depth of Field Augmented Reality (AR) 3D Display Based on MEMS Laser Projection Array

The light collimation performance of each imaging unit in integral photography determines the viewing distance and depth of the field of the stereoscopic scene. MEMS laser projector has a good light collimation effect. Our work is to implement MEMS array extension through the subtle design of light paths. The single‐line MEMS scanning array and the multi‐mirror array are finely coordinated. Projection array realizes stereo display by transforming spatial pixels into angle information. The 3D light field is rendered using the space‐time multiplexing technology of MEMS laser scan projection. On this basis, we try to replace the multi‐mirror array with a semi‐transmission and semi‐reflection mirror array to achieve augmented reality. The mirror array can balance the number of views and pixels. The depth information of the real object is obtained using the structured light scanning technology of the depth camera. The calibration, registration, accurate fusion, and in‐situ superposition of the 3D reconstruction scene and the natural scene are realized.

A Miniature LiDAR With a Detached MEMS Scanner for Micro-Robotics

Light detection and ranging (LiDAR) has been widely used for airborne surveillance and autonomous driving. The ability of robotics or even micro-robotics can be drastically enhanced if equipped with LiDAR, but very light and small LiDAR must be used. Micro-robots have sizes close to birds or insects, and almost all existing LiDAR are too heavy and too large for them. In this work, a novel MEMS LiDAR, with its optical scanner separated from its base, is proposed and demonstrated. The scanner head will be carried by a moving micro-robot while the LiDAR base is fixed on the ground. There is a thin, flexible optical/electrical cable connecting the scanner head to the base. The scanner head consists of a MEMS mirror and a rod lens, which weighs only 10 g and measures under 4 cm long. The MEMS mirror has an aperture of 1.2 mm <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times \,\,1.4$ </tex-math></inline-formula> mm and can scan a field of view (FoV) of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$9^{\circ } \times 8^{\circ }$ </tex-math></inline-formula> . As the micro-robot and the optical scanner head moves with respect to the optical receiver, an IMU (inertial measurement unit) has been embedded in the scanner head to track the motion and an algorithm has been developed to reconstruct the true point clouds. The movable head LiDAR can acquire 400 points per second and detect targets up to 35 cm away. A micro-robot can carry the scanner head while it is moving, and the point clouds can be generated at the LiDAR base. This new LiDAR configuration enables ranging, mapping, tracking, and zoom-in scanning for micro-robots.

High resolution laser fringe pattern projection based on MEMS micro-vibration mirror scanning for 3D measurement

3D measurement of micro-sized components by Fringe projection profilometry (FFP) requires fringe patterns with high spatial resolution. In order to project high-resolution and fine fringe patterns, a MEMS scanning module is used to project the precise time-modulated line laser stripes into space to form high-resolution laser fringes. The micro-vibration mirror in the MEMS module works in a resonant state, and the internal position detection of the MEMS module generate precise time reference signal. The reference signal is used to project spatial fringe patterns and ensure the stability and high resolution. The high-resolution laser fringe patterns generated by MEMS scanning module are projected to micro-sized components for 3D measurement. The measurement experiment shows that the spatial resolution of the projected fringes can reach 0.47 mm and the phase shift resolution is 0.12 mm. The measurement results show that the tiny height changes of the measured components can be well measured and presented. The standard gauge block with a height of 1 mm is measured, and the root mean square error of the measured height is 0.037 mm. It has a good prospect to apply the proposed method to the 3D measurement of micro-sized components.

High speed external cavity diode laser concept based on a resonantly driven MEMS scanner for the mid-infrared region.

The rapid detection of trace gases is of great relevance for various spectroscopy applications. In this regard, the technology of external cavity diode lasers (ECDLs) has firmly established itself due to its excellent properties. Outside of the laboratory environment, however, these still have some restrictions, especially with regard to high acquisition rates for sensitive spectroscopy applications and mode-hop-free tuning. In this article, we present our innovative GaSb-based ECDL concept, in which a resonantly driven microelectromechanical system actuator is used. With this, a defined frequency range can be tuned extremely fast and without mode hops. Results of the characterization and its use for the rapid detection of trace gases are presented.

A semi-coaxial MEMS LiDAR design with independently adjustable detection range and angular resolution

MEMS-based LiDAR has the advantages of low cost and small volume, but suffers from finding a trade-off between the detection range and angular resolution in coaxial solution and a poor anti-interference ability in non-coaxial solution. A novel semi-coaxial MEMS LiDAR design with independently adjustable detection range and angular resolution is proposed in this paper, in which one small vertical scanning and two large synchronized horizontal scanning uniaxial MEMS mirrors are employed. In this design, the angular resolution and detection range are determined by the vertical scanning MEMS mirror and the horizontal scanning MEMS mirrors, independently. So that a larger detection range can be obtained by employing larger-size horizontal scanning mirrors and a higher angular resolution can be obtained by employing a higher-frequency vertical scanning MEMS mirror. Eventually, a miniaturized semi-coaxial MEMS LiDAR prototype with a FOV of 60°×10° (horizontal×vertical), a resolution of 301×17 (horizontal×vertical) pixels and a 19Hz frame rate is set up and the experiment results show that this design is reasonable to obtain a large detection range and high angular resolution simultaneously.

Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars

This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64 % and 0.26 %, respectively, for 2 grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91 % and 0.15 % for y axis vibration, corresponding to 44.4 % and 43.0 % reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.

Application of OCT for osteonecrosis using an endoscopic probe based on an electrothermal MEMS scanning mirror

Osteonecrosis becomes a more widespread problem as the population is getting older. Current osteonecrosis diagnosis not only requires invasive procedures but also often leads to surgical replacement. This paper reports a preliminary study of applying optical coherence tomography (OCT) for noninvasive diagnosis of osteonecrosis using an endoscopic probe based on a microelectromechanical (MEMS) scanning mirror. The endoscopic MEMS probe is only 2.5 mm in diameter and can scan a field of view of 24°. First a tissue sample of femoral head with osteonecrosis is scanned with the MEMS probe. The resultant OCT images can clearly delineate the necrosis region from the normal bone. Then in vivo experiments are carried out on an adult rabbit, in which the rabbit’s femoral head is scanned and imaged with the same MEMS probe and both three-dimensional (3 D) structural images and blood flows are obtained. The OCT imaging experiments show that the femoral head of this rabbit does not have osteonecrosis and its blood flow is present, which is in agreement with the destructive diagnosis. The blood flow rates in the femoral head are extracted from the OCT images acquired in three cases: normal blood supply, partial ischemia and complete ischemia, which are 19.3 mm/s, 11.9 mm/s, and 1.88 mm/s, respectively. These experiments demonstrate that OCT can clearly distinguish between the osteonecrosis and normal bone and measure the blood flow rate in the bone, both with the cartilage present, showing great potential for non-invasive osteonecrosis diagnosis.