Magnetic field density concentrated permanent magnet structure for electromagnetic MEMS scanning mirror

Abstract

The study investigates the inadequacy of driving torque in large-diameter Micro-electro Mechanical Systems Electromagnetic Scanning Mirrors (MEMS-ESM) and introduces fresh insights into the power efficiency of traditional MEMS-ESM devices. A novel permanent magnet structure (PMS) and driving principle are devised, drawing upon the phenomenon of concentrated magnetic field density and a custom-designed PMS inner profile. In comparison to L-shaped and I-shaped PMSs, the proposed PMS delivers up to 3.48 times and 3.76 times greater driving torque within the same form factor. Moreover, the optimized proposed PMS has been experimentally proven to reduce power consumption by 53.3% and 81.4% and reduce total driving current by 31.3% and 55.0%, making it the sole solution that conforms to the safe current range. Additionally, the research analyzes the impact of variations in the optical scanning angle on the optimal PMS design. It is noteworthy that the proposed PMS enables the substitution of L-type and I-type PMSs with smaller package sizes, all while preserving torque, thus promoting the miniaturization of MEMS-SM.