Surface modification of PMMA (polymethylmethacrylate) was carried out by irradiation of low energy nitrogen ion and/or electron, which is expected to improve the surface hardness by introduction of a thin modified layer. Surface hardness was measured by using the nanoindentation test. To clarify the structure and the properties of the modified layer, composition and chemical bonds were analyzed using XPS (X-ray photoelectron spectroscopy) and FT-IR (Fourier transform infrared spectrometer).From these results, it was confirmed that surface hardness increased and some chemical bonds including nitrogen was introduced. Thus, it was suggested that cross-linking structure including nitrogen atom contributed on the increase of surface hardness.
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