In this paper, the characteristics of a localized-SOI (L-SOI) MOSFET are investigated for analog/RF applications. In the L-SOI device, the source/drain regions are quasi-surrounded by L-type oxide layers to reduce junction capacitance and avoid source/drain punchthrough, while the channel is directly connected with the substrate to alleviate the self-heating effect. Such structures can combine the advantages of both bulk and SOI MOSFETs and avoid their issues. Due to the unique structure of this novel device, the L-SOI MOSFET can exhibit excellent analog/RF behaviors. Higher <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> / <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">I</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ds</sub> ratio and intrinsic gain ( <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> / <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ds</sub> )can be received compared with the conventional SOI structure, particularly at low gate bias. Higher and , which are due to higher <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> and reduced gate capacitance, can be observed in the L-SOI MOSFET. In addition, better noise performance can be achieved resulting from reduced lattice temperature and improved <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> . Thus, the L-SOI MOSFET can be considered as one of the potential candidates for analog/RF applications.