Conformal Deposition Research Articles

Conformal Sodium Deposition Facilitated by Ion Adsorption‐Intercalation Process within Hetero‐Interface for Stable Sodium Metal Batteries

AbstractSodium (Na) metal battery is regarded as one of the most promising candidates for large‐scale energy storage devices, benefiting from the abundant sodium reserves and low cost. However, its practical application is hindered by the dendrite growth and unstable electrode‐electrolyte interface. Herein, a 3D sodiophilic structure composed of a carbon matrix overlaid with g‐C3N4 coating layers (g‐C3N4/3D‐C) is designed to stabilize the Na plating/stripping behavior. The sodiophilicity is endowed by a highly reversible adsorption‐intercalation process at the hetero‐interface, which can guide conformal Na deposition and induce the formation of inorganic‐rich solid‐electrolyte interphases with high structural stability and fast Na‐ion transport. Meanwhile, the 3D scaffold can effectively accommodate Na deposition during Na plating/stripping and depress the dendrite formation. As a result, the half cell assembled with g‐C3N4/3D‐C electrode delivers long‐term cycling performance at 1.0 mA cm−2 with a high Coulombic efficiency of 99.92% for over 2000 cycles and of 99.94% even at 5 mA cm−2, 10 mAh cm−2. The practical feasibility of the g‐C3N4/3D‐C is verified with full cells, which shows favorable rate capability and long‐cycle performance. The sodiophilic hetero‐interface construction strategy proposed in this work sparks new insights for designing high‐performance Na metal anodes.

Strain-Controlled Galvanic Synthesis of Platinum Icosahedral Nanoframes and Their Enhanced Catalytic Activity toward Oxygen Reduction.

The unique strain distribution on the surface of a Pd icosahedral nanocrystal is leveraged to control the sites for oxidation and reduction involved in the galvanic replacement reaction. Specifically, Pd is oxidized and dissolved from the center of each {111} facet due to its tensile strain, while the Pt(II) precursor adsorbs onto the vertices and edges featuring a compressive strain, followed by surface reduction and conformal deposition of the Pt atoms. Once the galvanic reaction is initiated, the {111} facets become more vulnerable to oxidation and dissolution, as the vertices and edges are protected by the deposited Pt atoms. The site-selected galvanic reaction naturally results in the formation of Pt icosahedral nanoframes covered by compressively strained {111} facets, which show enhanced catalytic activity and durability toward oxygen reduction relative to commercial Pt/C.

Conformal SnO2 and NiOx charge transport layers for pragmatic air-processed perovskite solar cells

The industrialization of perovskite (PVK) solar cells (PSCs) necessitates simple manufacturing, cheapness, nontoxicity, high efficiency, and stability. We report an air-processed lead halide PSCs with cheap, nontoxic, stable NiOx and SnO2 as the hole and electron transport layers separately, to meet all the above commercial requests. By preparing the NiOx (water-dispersible) and SnO2 (oil-dispersible) quantum dots (QDs) with good conductivity and energy band matched well with that of PVK, we fabricate inverted PSCs (ITO/NiOx/PVK/SnO2/Ag) with efficiency up to 20.1/14.6% for active areas of 0.0707/1 cm2, under 1 sun simulated illumination with enhanced UV light ratio. The UV-light resistant PSCs reported here will impel their application in the high altitude areas with strong UV light. Importantly, the monodisperse size and dominant (110) plane of SnO2 QDs achieved by controlling the solvothermal parameters, realize the conformal deposition and defect prevention of SnO2, respectively, thus improving the PSC efficiency and stability.

Interplay of physical and textural properties in porous, nanostructured hard‑carbons as electrode materials for non-Faradic energy storage devices

This work presents a systematic investigation on the non-Faradic energy storage ability of non-graphitizable, porosity engineered hard‑carbon nanostructures as electrode materials. The persistent challenge of inducing and tuning porosity in hard‑carbon nanostructures is overcome here, by utilizing dendritic fibrous nano silica (DFNS) as a sacrificial template for uniform and conformal deposition of carbon through thermal chemical vapor deposition, leading to the formation of porosity tuned, nanostructured hard‑carbon florets (NCF). This strategy enables precisely crafted six varieties of NCF with varying yet monodisperse dimensions (NCF 90, NCF 350, NCF 366, NCF 430, NCF 540 and NCF 600), SSA (494–719 m2/g) and textural features such as pore volume (0.67–1.24 cm3/g) and pore diameter (3.83–5.65 nm). In contrast to current understanding, NCF 366 with defect length of 16 nm, defect density of 2.65 × 1011 cm−2, micro- to mesoscale pore ratio of 0.16 and specific surface area of 535 m2/g achieves the highest energy density of 14.6 Wh/kg and power density 10.0 kW/kg, when compared to NCF 90 with higher SSA (719 m2/g) and pore volume (1.24 cm3/g). Thus, this work manifests the critical contributions of tuning the pore structures and optimizing the relative contributions from multi-scale pore structures to achieve high-performing energy storage devices.

Validation of dual-energy CT-based composition analysis using fresh animal tissues and composition-optimized tissue equivalent samples

Objective. Proton therapy allows for highly conformal dose deposition, but is sensitive to range uncertainties. Several approaches currently under development measure composition-dependent secondary radiation to monitor the delivered proton range in-vivo. To fully utilize these methods, an estimate of the elemental composition of the patient’s tissue is often needed. Approach. A published dual-energy computed tomography (DECT)-based composition-extraction algorithm was validated against reference compositions obtained with two independent methods. For this purpose, a set of phantoms containing either fresh porcine tissue or tissue-mimicking samples with known, realistic compositions were imaged with a CT scanner at two different energies. Then, the prompt gamma-ray (PG) signal during proton irradiation was measured with a PG detector prototype. The PG workflow used pre-calculated Monte Carlo simulations to obtain an optimized estimate of the sample’s carbon and oxygen contents. The compositions were also assessed with chemical combustion analysis (CCA), and the stopping-power ratio (SPR) was measured with a multi-layer ionization chamber. The DECT images were used to calculate SPR-, density- and elemental composition maps, and to assign voxel-wise compositions from a selection of human tissues. For a more comprehensive set of reference compositions, the original selection was extended by 135 additional tissues, corresponding to spongiosa, high-density bones and low-density tissues. Results. The root-mean-square error for the soft tissue carbon and oxygen content was 8.5 wt% and 9.5 wt% relative to the CCA result and 2.1 wt% and 10.3 wt% relative to the PG result. The phosphorous and calcium content were predicted within 0.4 wt% and 1.1 wt% of the CCA results, respectively. The largest discrepancies were encountered in samples whose composition deviated the most from tabulated compositions or that were more inhomogeneous. Significance. Overall, DECT-based composition estimations of relevant elements were in equal or better agreement with the ground truth than the established SECT-approach and could contribute to in-vivo dose verification measurements.

Laser Deposition of Metal Halide Perovskites.

Vacuum-based or vapor-phase deposition is the most mature and widely used method for thin-film growth in the semiconductor industry. Yet, the vapor-phase growth of halide perovskites remains relatively underexplored compared to solution process deposition. The intrinsically largely distinct volatilities of organic and inorganic components in halide perovskites challenge the standard physical vapor deposition techniques. Thermal coevaporation tackles this with independent thermally controlled sources per precursor. Alternatively, pulsed laser deposition uses the energy of a laser to eject material from a target via thermal and nonthermal processes. This provides high versatility in the target composition, enabling the deposition of complex (including hybrid) thin films from a single-source target. This Perspective presents an overview of recent advances in laser-based deposition of halide perovskites, discusses advantages and challenges, and motivates the development of physical vapor deposition methods for hybrid materials, especially for applications requiring dry, conformal, and multilayer deposition.

Localized surface roughening to improve adhesion of electroless seed layer in through-glass vias

This article reports the improvement of the adhesion of the electroless seed layer deposited on glass substrates used in creating through-glass vias (TGV) by localized surface roughening. Four glass substrates having varying roughness characteristics were prepared by electrochemical discharge machining (ECDM) and ultrasonic machining (USM). The electroless nickel seed layer was deposited directly on glass without any adhesion layer, followed by electrodeposited copper layers. In-depth surface topography and morphology analysis reveal the mechanism behind the improved adhesion during standard peel and cross-hatch adhesion tests, which were used to determine the interlayer adhesion.Localized roughening techniques generated specific microfeatures, i.e., microgrooves (in USM) or ridges (in ECDM), increasing the surface area. These features acted as interlocking/nucleation sites to hold the electroless nickel atoms, resulting in higher interfacial adhesion. USM-roughened samples exhibited stronger interfacial adhesion than their ECDM-roughened counterparts, which indicated that the interlayer adhesion depends on topography and the roughened surface's morphology. The surface with negative skewness and positive excess kurtosis promotes mechanical interlocking, offering a promising strategy for enhancing interlayer adhesion. Finally, conformal deposition in a 6 × 6 array of through-holes having an aspect ratio of ∼4 was also demonstrated.

Rapid, microwave-assisted deposition of anisotropic silver nanostructures on various substrates.

A facile, rapid, and scalable in situ microwave-assisted solvothermal technique (MAST) has been developed to deposit anisotropic silver nanoparticles (AgNP) on various substrates in a solution medium. SEM-EDS and XRD were used to characterize the morphology and structure of the deposits. Deposition on non-patterned aluminium led to near-spherical AgNP agglomerates all across the surface. Deposition on the glass at optimum solution concentration led to mirror-like coatings comprising spherical ∼50 nm particles, whereas no coating occurred at lower concentrations. AgNPs decorated the hexagonal pattern formed on a nano-patterned aluminium (NPA) substrate. Among various precursor concentrations used for deposition on NPA, the 10 μM concentration resulted in conformal deposition, with nanoparticles decorating the hexagons in NPA. In contrast, AgNP density was lower in the concave dimples on NPA. Our work demonstrates a quick and easy approach for the AgNPs' deposition, with control over size, and morphology. It can be used for deposition on large substrates, potentially making it suitable for surface-enhanced spectroscopic applications.

Haze factor of silver nanowires in variable refractive index environment: experimental and simulation approaches

While silver nanowires (Ag NWs) have been demonstrated as a highly efficient transparent conducting material, they suffer from strong light scattering, which is quantified by a large haze factor (HF) in the optical spectrum. Here we investigate the influence of the dielectric environment on the light scattering of Ag NWs by comparing experimental measurements and simulations. In air, two peaks on the HF spectra are observed experimentally at the wavelength of λ I = 350 nm and λ II = 380 nm and are attributed by simulations to the influence of the Ag NWs pentagonal shape on the localized surface plasmon resonance. The relative intensity between the two peaks is found to be dependent on whether the Ag NWs are in contact with the glass substrate or not. The HF behaviour in the near IR region seems to be dominated by Rayleigh scattering following simulations results. Dielectric environments of Ag NWs with various refractive indexes were obtained experimentally by the conformal deposition of different metal oxide coatings using atomic layer deposition, including Al-doped zinc oxide, Al2O3 and SiO2 coatings. The HF is found to be correlated with the refractive index environment in terms of HF peaks position, intensity and broadening. This trend of HF peaks is supported by a theoretical model to understand the optical mechanism behind this phenomenon.

Direct Electrodeposition of Electrically Conducting Ni3(HITP)2 MOF Nanostructures for Micro-Supercapacitor Integration.

Micro-supercapacitors emerge as an important electrical energy storage technology expected to play a critical role in the large-scale deployment of autonomous microdevices for health, sensing, monitoring, and other IoT applications. Electrochemical double-layer capacitive storage requires a combination of high surface area and high electronic conductivity, with these being attained only in porous or nanostructured carbons, and recently found also in conducting metal-organic frameworks (MOFs). However, techniques for conformal deposition at micro- and nanoscale of these materials are complex, costly, and hard to upscale. Herein, the study reports direct, one step non-sacrificial anodic electrochemical deposition of Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2 - Ni3(HITP)2, a porous and electrically conducting MOF. Employing this strategy enables the growth of Ni3(HITP)2 films on a variety of 2D substrates as well as on 3D nanostructured substrates to form Ni3(HITP)2 nanotubes and Pt@ Ni3(HITP)2 core-shell nanowires. Based on the optimal electrodeposition protocols, Ni3(HITP)2 films interdigitated micro-supercapacitors are fabricated and tested as a proof of concept.

Effect of TiO2 nanoparticle load on photoelectric properties of TiO2/VGs heterojunction

Preparation of Titanium dioxides loaded vertical graphene nanosheets (TiO2/VGs) composite films with heterojunctions by a multi-plasma combination method. Highly vertically oriented VGs were prepared by helicon wave plasma chemical vapor deposition (HWP-CVD), and TiO2 nanoparticles were deposited on VGs templates by ultra-high vacuum magnetron sputtering (UH-MS). By controlling the sputtering time of TiO2 nanoparticles to modulate the nanoparticle loading content. The morphology, structure, and photocatalytic performance of heterojunction TiO2/VGs composite films were investigated. The characterization results of morphology and structure show that the structure of VGs nanosheets is not altered by the increase of the deposited particle content, indicating that VGs have excellent mechanical properties as a template for TiO2 loading. As the deposition time of the TiO2 nanoparticles increases, the loading type progresses from epitaxial growth at the beginning to conformal deposition and eventually to gap-filling growth. Photoelectric performance tests showed that the heterojunctions were formed at the interface between TiO2 and VGs. The photovoltage test results show that the photogenerated carriers are effectively separated at the interface, and the nanosheets can promote the migration of separated electrons to the external circuit. The variation in photocurrent density shows a positive correlation with the number of TiO2 attachment sites and loading content on the surface of the VGs nanosheets.

Catalytic atomic layer deposition of amorphous alumina–silica thin films on carbon microfibers

Deposition of silica-based thin films on carbon microfibers has long been considered a challenge. Indeed, the oxidation-sensitive nature of carbon microfibers over 550 K and their submicron-textured surface does not bode well with the required conformity of deposition best obtained by atomic layer deposition (ALD) and the thermal oxidative conditions associated with common protocols of silica ALD. Nonetheless, the use of a catalytic ALD process allowed for the deposition of amorphous alumina–silica bilayers from 445 K using trimethylaluminium and tris(tert-pentoxy)silanol (TPS). In this study, first undertaken on flat silicon wafers to make use of optical spectroscopies, the interplay between kinetics leading to a dense silica film growth was investigated in relation to the applied operation parameters. A threshold between the film catalyzed growth and the complete outgassing of pentoxy-derived compounds from TPS was found, resulting in a deposition of equivalent growth per cycle of 1.1 nm c−1, at a common ALD rate of 0.3 nm min−1, with a flat thickness gradient. The deposition on carbon microfiber fabrics was found conformal, albeit with a thickness growth capped below 20 nm, imparted by the microfiber surface texture. STEM-EDX showed a sharp interface of the bilayer with limited carbon diffusion. The conformal and dense deposition of alumina–silica thin films on carbon microfibers holds great potential for further use as refractory oxygen barrier layers.

Incremental Feeding of Perovskite Powders: Angstrom‐Precision Growth for Single‐Source Solar Cell Fabrication

Vacuum‐based deposition of halide perovskites receives a lot of attention for its proven scalability and conformal depositions. Co‐evaporation has remarkable success, but efficiencies continue to lag behind their solution‐based counterparts. This is in part attributed to the complex sublimation behavior of some organic ammonium precursor salts and the increased complexity of the absorber materials, requiring the use of four or more sources in a conventional co‐evaporation setup. The latter has driven work into single‐source methods with flash evaporation presented as one such method. However, flash evaporation processes typically evaporate all material in a single batch, leading to short deposition times at high temperatures. Particle sputtering effects seen at these high temperatures drive processes toward low temperatures where prolonged exposure causes degradation. Here, a pulse‐driven incremental powder feeding system is presented. This method is capable of stable flash evaporation rates for >1 h, with controlled rates as low as 1.5 Å per pulse (±0.89). The feasibility of this method is demonstrated for three different perovskite compositions: FAPbBr3, MAPbI3, and FA1−xMAxPbSnI3:SnF2. Furthermore, FAPbBr3 and MAPbI3 are integrated into all vacuum‐processed thin‐film solar cells leading to power conversion efficiencies (PCE) of ~4% and 10%, respectively.

Review—Solid and Polymer Electrolyte Materials and Related Processing Methods Suitable for Three-Dimensional Battery Architectures

Three-dimensional (3D) battery architectures have been envisioned to enable high energy density electrodes without the associated power drop experienced by planar cells. However, the development of 3D cells is hampered by difficulties producing conformal solid-state electrolytes (SSE), solid polymer electrolytes (SPE) and gel polymer electrolytes (GPE) that are pinhole-free and have adequate ionic conductivities. Fortunately, electrolytes in 3D cells are often utilized at lower thickness, which may compensate the decreased ionic conductivity. Here, we comprehensively review potential 3D SSE, SPE and GPE electrolyte materials by compiling their thickness and room temperature ionic conductivity. We use area specific resistance (ASR) as a metric to compare 3D electrolytes with one another and conventional electrolytes. We find that certain process-material combinations, such as atomic layer deposition of SSEs, electrodeposition of SPEs and GPEs, and initiated chemical vapor deposition of SPEs demonstrate ASRs beneath the interfacial impedances of Li-based systems and approach state-of-the-art electrolytes. We also comment on additional factors, such as electrochemical stability, that should be evaluated when determining 3D electrolyte suitability. Future research should focus on adapting known materials chemistries for conformal deposition techniques to further improve the ionic conductivity, as these techniques are capable of producing the necessary thicknesses and conformality.

Conformal Deposition of Lithium Metal on Electroactive Organic Materials

AbstractDespite the enormous efforts to control the growth behavior of Li, achieving a dendrite‐free Li deposition and high‐energy‐density have remained an inevitable challenge of Li metal batteries. Here, the conformal deposition of Li metal is reported on electroactive organic materials to achieve a high‐energy‐density and electrochemical longevity. To this end, Li2C8H4O4 (Li2TP), which can act as both the electrode material (providing the redox capacity) and Li host (inducing the dendrite‐free Li deposition), is used as the model electroactive organic material. The Li2TP host exhibits reversible sequential lithiation/delithiation and Li deposition/stripping reactions. Consequently, a Li‐free full cell constructed by the Li2TP host (without pre‐charging) and a LiFePO4 cathode delivered a high areal capacity (≈3.8 mAh cm−2), exceptional rate performance (≤12 mA cm−2), and superior cyclability (80% capacity retention after 100 cycles). This electroactive organic material‐based Li host strategy can provide a new perspective for the development of practical Li metal batteries.

A Breathable Fibrous Membrane with Coaxially Heterogeneous Conductive Networks toward Personal Thermal Management and Electromagnetic Interference Shielding.

The expeditious growth of wearable electronic devices has boomed the development of versatile smart textiles for personal health-related applications. In practice, integrated high-performance systems still face challenges of compromised breathability, high cost, and complicated manufacturing processes. Herein, a breathable fibrous membrane with dual-driven heating and electromagnetic interference (EMI) shielding performance is developed through a facile process of electrospinning followed by targeted conformal deposition. The approach constructs a robust hierarchically coaxial heterostructure consisting of elastic polymers as supportive "core" and dual-conductive components of polypyrrole and copper sulfide (CuS) nanosheets as continuous "sheath" at the fiber level. The CuS nanosheets with metal-like electrical conductivity demonstrate the promising potential to substitute the expensive conductive nano-materials with a complex fabricating process. The as-prepared fibrous membrane exhibits high electrical conductivity (70.38 S cm-1), exceptional active heating effects, including solar heating (saturation temperature of 69.7 °C at 1 sun) and Joule heating (75.2 °C at 2.9V), and impressive EMI shielding performance (50.11dB in the X-band), coupled with favorable air permeability (161.4mm s-1 at 200Pa) and efficient water vapor transmittance (118.9g m-2 h). This work opens up a new avenue to fabricate versatile wearable devices for personal thermal management and health protection.

Electrophoretic Deposition as a Versatile Low-Cost Tool to Construct a Synthetic Polymeric Solid-Electrolyte Interphase on Silicon Anodes: A Model System Investigation.

The cycling of next-generation, high-capacity silicon (Si) anodes capable of 3579 mAh·g-1 is greatly hindered by the instability of the solid-electrolyte interphase (SEI). The large volume changes of Si during (de)lithiation cause continuous cracking of the SEI and its reconstruction, leading to loss of lithium inventory and extensive consumption of electrolyte. The SEI formed in situ during cell cycling is mostly composed of molecular fragments and oligomers, the structure of which is difficult to tailor. In contrast, ex situ formation of a synthetic SEI provides greater flexibility to deposit long-chain, polymeric, and elastomeric components potentially capable of maintaining integrity against the large ∼350% volume expansion of Si while also enabling electronic passivation of the surface for longer cycling and calendar life. Furthermore, polymers are amenable to structural modifications, and the desired elasticity can be targeted by selection of the SEI polymer feedstock. Herein, electrophoretic deposition (EPD) is used to apply chitosan as a synthetic SEI on model Si thin film electrodes. Comparison of synthetic SEIs obtained without (Si/Chit) and with CH3COOLi (Si/Chit+CH3COOLi) added during EPD is performed to demonstrate a facile route to tuning of the polymer SEI chemistry. Atomic force and scanning electron microscopy reveal that addition of CH3COOLi at EPD assists in conformal deposition of the synthetic SEI. During electrochemical cycling, the Chit+CH3COOLi coating nearly doubles the capacity retention versus the reference bare Si thin film. X-ray photoelectron and Fourier transform infrared spectroscopy reveal that CH3COOLi caps the -NH2 groups of chitosan through amidation during EPD, which suppresses the catalytic reduction of the electrolyte. The presented approach demonstrates and validates EPD as a low-capital route to achieving and chemistry-tuning synthetic SEIs on Si electrodes. More broadly, the method is a promising avenue toward controlled and tailored polymeric SEIs on various conversion-type electrodes with high particle volumetric expansion.

High-performance monolayer MoS2 nanosheet GAA transistor

In this article, a 0.7 nm thick monolayer MoS2 nanosheet gate-all-around field effect transistors (NS-GAAFETs) with conformal high-κ metal gate deposition are demonstrated. The device with 40 nm channel length exhibits a high on-state current density of ~410 μA μm−1 with a large on/off ratio of 6 × 108 at drain voltage = 1 V. The extracted contact resistance is 0.48 ± 0.1 kΩ μm in monolayer MoS2 NS-GAAFETs, thereby showing the channel-dominated performance with the channel length scaling from 80 to 40 nm. The successful demonstration of device performance in this work verifies the integration potential of transition metal dichalcogenides for future logic transistor applications.

Conformal coating of macroscopic nanoparticle compacts with ZnO via atomic layer deposition

Conformal atomic layer deposition (ALD) inside macroscopic nanoporous solids with aspect ratios greater than 103 can require ALD reactant exposures on the order of 103 Torr-s or greater. For some ALD chemistries, such large exposures raise the concern of non-self-limiting deposition. In the case of ZnO ALD from diethylzinc (DEZ) and H2O, exposures in the 10–103 Torr-s range have resulted in metallic Zn deposition at typical temperatures used for ZnO ALD on wafers (e.g., ∼180 °C). This Zn deposition can be suppressed by lowering the deposition temperature, but this slows H2O desorption and, thus, can necessitate impractically long purge times. In this work, we use static-dose ALD with DEZ and H2O exposures >104 Torr-s to deposit ZnO inside Al2O3 nanoparticle compacts (NPCs) with 50.5 ± 0.3% porosity, 100 nm NP diameter, 1.55 ± 0.05 mm thickness, and an aspect ratio of 7800 ± 200 (based on the half-thickness), and we explore a novel approach to the deposition temperature, T: T is cycled between 160 °C (for H2O purges) and 120 °C (for all other steps). For comparison, we also deposit ZnO with T held constant at 120 or 160 °C. Whereas the T = 160 °C process results in Zn metal deposition and nonuniform infiltration, the temperature-cycled process yields apparently self-limiting ZnO deposition at a growth per cycle (GPC) of ∼2.1 Å/cyc, forming an electrically conductive ZnO network that is uniform throughout the thickness of the NPC, with the exception of some ZnO depletion near the NPC surfaces, possibly due to the (unoptimized) long DEZ purge time. The T = 120 °C process produces similar results, although the GPC is slightly elevated, indicating diminished removal of H2O and/or OH during purges. We employ scanning electron microscopy with energy-dispersive x-ray spectroscopy, x-ray diffractometry, electrical resistivity measurements, and ALD chamber pressure analysis in our comparison of the three ALD processes.

Conformal growth of GaP on high aspect ratio Si structured surface via plasma-enhanced atomic layer deposition

This article is concerned with the study of conformal growth of thin gallium phosphide (GaP) layers by plasma-enhanced atomic layer deposition (PE-ALD) on a Si structured surface. GaP layers were deposited on (100) silicon wafers with a structured surface in the form of silicon microcolumns and black silicon. Deposition process were carried out at temperature of 380 °C using trimethylgallium and phosphine precursors. According to transmission electron microscopy (TEM), GaP layers deposited by this method conformally grown on the high aspect ratio structured silicon surface. The energy-dispersive X-ray spectroscopy (EDX) study show that the distribution of the main components of the GaP layer is uniform alongside surface of the silicon microcolumns and wires. High resolution TEM study confirms that GaP layers on the surface of silicon microcolumns and wires are epitaxial with the inclusion of twin lattice defects. Therefore, this deposition method can be used for the conformal deposition of thin crystalline layers of GaP on structured silicon surfaces with a high aspect ratio.