Mercury cadmium telluride (Hg1−xCdxTe) is widely utilized for infrared detection applications. However, the quality of the surface and the presence of interface defects significantly impact device performance, so further improvements in surface passivation are still necessary. In this study, we explore the use of plasma-enhanced atomic layer deposition (PE-ALD) to deposit HfO2 as a passivation layer for HgCdTe in the temperature range of 80–160 °C. The insulating film, semiconductor surface, and their interface are characterized using spectral ellipsometry, X-ray photoelectron spectroscopy (XPS), electron energy loss spectroscopy (EELS), atomic force microscopy (AFM), electron microscopy, and capacitance–voltage (C–V) methods. XPS analysis reveals that the fraction of impurities in the HfO2 films significantly decreases at higher deposition temperatures. Simultaneously, changes in the surface composition of HgCdTe become more pronounced. The bandgap width of HfO2 and the insulator–semiconductor interfacial band discontinuity are estimated using EELS and XPS. The surface morphology of the deposited coatings closely resembles that of the underlying HgCdTe. The permittivity of the insulator and the effective fixed charge strongly depend on the deposition temperature. Our findings demonstrate that low-temperature PE-ALD HfO2 effectively passivates the HgCdTe surface, and we propose an optimal deposition temperature for the further development of HgCdTe-based devices.
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