<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> We grew rhombohedrally distorted BiFeO<formula formulatype="inline"> <tex Notation="TeX">$_{3}$</tex></formula> and hexagonal YMnO<formula formulatype="inline"> <tex Notation="TeX">$_{3}$</tex></formula> thin films on Pt/TiO<formula formulatype="inline"> <tex Notation="TeX">$_{2}$</tex></formula>/SiO<formula formulatype="inline"> <tex Notation="TeX">$_{2}$</tex></formula>/Si substrates via RF magnetron sputtering technique in a pure oxygen atmosphere. BiFeO<formula formulatype="inline"> <tex Notation="TeX">$_{3}$</tex></formula> and YMnO<formula formulatype="inline"> <tex Notation="TeX">$_{3}$</tex></formula> targets were self-made by the usual solid-state reaction method. We investigated the effects of deposition temperature upon crystalline structure, surface morphology, magnetization, and electrical polarization of BiFeO<formula formulatype="inline"><tex Notation="TeX">$_{3}$</tex> </formula> and YMnO<formula formulatype="inline"><tex Notation="TeX">$_{3}$</tex> </formula> thin films. The crystalline structure was studied by X-ray diffraction, and the topography of film surface was analyzed by atomic force microscopy. We also conducted measurements of ferroelectric and ferromagnetic hysteresis loops to study the electrical and magnetic behavior of the samples. Polarization, as a function of electric field in capacitor structures based on our BiFeO<formula formulatype="inline"><tex Notation="TeX">$_{3}$</tex></formula> films, shows hysteretic behavior with a coercive field of 54 kV/cm and a remanent polarization of 21 <formula formulatype="inline"><tex Notation="TeX">$\mu$</tex></formula>C/cm<formula formulatype="inline"><tex Notation="TeX">$^{2}$</tex></formula>; whereas, YMnO<formula formulatype="inline"><tex Notation="TeX">$_{3}$</tex></formula> films show hysteretic behavior with coercive field of 2.4 kV/cm, remanent polarization of 1.2 <formula formulatype="inline"><tex Notation="TeX">$\mu$</tex></formula>C/cm<formula formulatype="inline"><tex Notation="TeX">$^{2}$</tex></formula>, and saturation polarization of 3.5 <formula formulatype="inline"><tex Notation="TeX">$\mu$</tex> </formula>C/cm<formula formulatype="inline"><tex Notation="TeX">$^{2}$</tex> </formula>. Magnetization measurements of the BiFeO<formula formulatype="inline"> <tex Notation="TeX">$_{3}$</tex></formula> films evidence weak ferromagnetism, that can be related to the presence of a small quantity of ferromagnetic impurities. </para>