Abstract
YMnO3 films were prepared by pulsed laser deposition (PLD) on epitaxial (111) Pt/(0001) sapphire substrates. A systematic study regarding the deposition conditions revealed that the composition of the YMnO3 epitaxial films changed depending on deposition temperature and period, due to the evaporation of Mn from the target and/or the film surface during the deposition. To overcome this issue, low-temperature growth, improvement in target density and the change in the substrate heating system were attempted. To enhance photonic ablation, the excimer laser for the ablation was changed from KrF (248 nm) to ArF (193 nm). Eventually, the ferroelectricity of the YMnO3 film deposited at 740°C was significantly improved. Furthermore, the YMnO3 film with almost identical ferroelectric property was successfully obtained even at 700°C.
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