A planar optical waveguide was formed in RbTiOPO4 crystal by6.0-MeV oxygen ion implantation with the dose of 2×1015 ions/cm2 at room temperature. Annealing at 200°Cfor 30 min in air is performed to improve the thermal stability of thewaveguide. The dark modes of the waveguide are measured at wavelengths633 and 1539 nm, respectively. The refractive index profiles in theguiding layer are reconstructed by using the reflectivity calculationmethod. TRIM'98 code was carried out to simulate the damage profilescaused by the implantation process to obtain a better understanding ofthe waveguide formation.
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