Abstract

We report on the optical planar waveguide formation in KTiOPO4crystals by single or double oxygen ion implantation at energies of2.4–3.0 MeV and doses of 1015 ions/cm2. The dark-linespectroscopy properties are investigated by a prism-coupling method.With an effective refractive index method, the refractive indexprofiles of the waveguides are reconstructed. The program codeTRIM'98 (transport of ions in matter) is used to simulate theimplantation process of oxygen ions into the KTiOPO4 crystal. Itis found that an inherent relationship exists between the nucleardamage and the refractive index changes induced by the ion-beamimplantation.

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