Si-Zr-Y co-deposition coatings on an Nb-Ti-Si-Cr base ultrahigh temperature alloy were prepared by pack cementation processes at 1250 for 8 h with different halide activators in the packs. The structure, constituent phases and formation process of the coatings were investigated. The results show that all the coatings are mainly composed of an (Nb, X)Si2 (X represents Ti, Cr and Hf elements) outer layer, a (Ti, Nb)5Si4 transitional layer, and an Al, Cr and Y-rich (Nb, X)5Si3 inner layer located between the coating and the substrate. In the five kinds of (NaF, NH4F, NH4Cl, NaBr and NaCl) activators investigated, the coatings prepared respectively with NaF and NH4F activators are thicker and denser, and furthermore, the contents of both Zr and Y elements are larger in the coating prepared with NaF as the activator. However, the coatings prepared respectively with NH4Cl, NaBr and NaCl as the activators are thiner, and lots of holes and ZrO2 and HfO2 particles are observed in the surface layer of the coatings. The higher equilibrium partial pressures of gaseous halide silicides in the packs resulted in thicker and denser co-deposition coatings, while the equilibrium partial pressures of