High quality cadmium oxide (CdO) thin films were prepared through an inexpensive and simple nebulized Spray Pyrolysis (neb-SP) technique. The transparent conducting CdO thin films deposited at different substrate temperatures (TS) for the ethanol and liquefied petroleum gas (LPG) sensor application. XRD, SEM, UV–vis Spectroscopy and Hall Effect were done to study the structural, morphological, optical and electrical properties respectively. Polycrystalline nature thin films shows (1 1 1) cubic structure as the prominent peak. Surface morphology studies reveal that the grain size and roughness of the films are increased with increase in the substrate temperature. The average transmittance of the yellowish transparent CdO thin films is about 57%, thus the films are transparent in the visible region. The optical band gap (Eg) value of the CdO films increased from 2.16 to 2.28 eV with increase in the TS from 225 °C to 300 °C. The minimum value of electrical resistivity of the films is 1.40 × 10−3 Ωcm obtained at 275 °C. The neb-SP deposited CdO thin film (275 °C) shows maximum response to the ethanol and LPG gas sensitivity of 31.87% and 16.4% respectively at operating temperature of 573 K. Thus the results authenticate that the CdO thin films deposited low substrate temperature with high quality can be achieved via neb-SP technique compared to other wet chemical or physical method.
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