In this study, we propose a triaxial force measurement sensor probe with piezoresistors fabricated via sidewall doping using rapid thermal diffusion. The device was developed as a tool for measuring micronewton-level forces as vector quantities. The device consists of a 15 µm thick cantilever, two sensing beams and four wiring beams. The length and width of the cantilever are 1240 µm and 140 µm, respectively, with a beam span of 1200 µm and a width of 10–15 µm. The piezoresistors are formed at the root of the cantilever and the sidewalls of the two sensing beams. The sensor spring constants for each axis were measured at kx = 1.5 N m−1, ky = 3.5 N m−1 and kz = 0.64 N m−1. We confirmed that our device was capable of measuring triaxial forces with a minimum detectable force at the submicronewton level.