Near-field Scanning Optical Microscopy Probe Research Articles

Optical Near-Field Probe Integrated With Self-Aligned Bow-Tie Antenna and Electrostatic Actuator for Local Field Enhancement

Microelectromechanical systems (MEMS)-based near-field scanning optical microscopy (NSOM) probes with a bow-tie antenna structure consisting of two metal triangular electrodes separated by a narrow gap have been designed and fabricated. An electrostatic actuator is integrated on this bow-tie probe to decrease the gap width for enhancing the optical near-field intensity. A self-alignment process based on deep reactive ion etching and wet anisotropic etching is established to fabricate the symmetric bow-tie structure. The static and dynamic actuations of electrostatic actuators are examined. With the mechanical resonance of the antenna structure to lateral direction, NSOM imaging is performed in the visible range, and the subwavelength resolution beyond the diffraction limit of light is demonstrated

Waveguide analysis of heat-drawn and chemically etched probe tips for scanning near-field optical microscopy

We analyze two basic aspects of a scanning near-field optical microscope (SNOM) probe's operation: (i) spot-size evolution of the electric field along the probe with and without a metal layer, and (ii) a modal analysis of the SNOM probe, particularly in close proximity to the aperture. A slab waveguide model is utilized to minimize the analytical complexity, yet provides useful quantitative results--including losses associated with the metal coating--which can then be used as design rules.

Photoinduced Nanodots in Bi<sub>2</sub>Sr<sub>2</sub>CaCu<sub>2</sub>O<sub>8+d</sub>

We report a fabrication of high-density nanodots by photodoping in overdoped Bi2Sr2CaCu2O8+d thin film (Tc = 80 K). A scanning near-field optical microscope probe is used to locally excite carrier, and photodoped region is associated with lower Tc phase (Tc = 75 K) via overdoping. Nanoscale characterizations with optical reflectivity reveal that nanodots (30-nm diameter) are regularly distributed in 50-nm step. The resultant films with photoinduced nanodots enhance Jc, a situation being similar to strong pinning effects observed in films modified by either ion irradiation or sputtered nanoparticles. These results suggest that photoinduced nanodots with lower Tc act as effective pinning centers.

Extending Near-Field Scanning Optical Microscopy for Biological Studies

Near-field scanning optical microscopy (NSOM) is a scanning probe technique that enables optical measurements to be conducted with nanometric spatial resolution. In addition to high-resolution optical information, NSOM yields a topographic mapping of sample features that enables a direct comparison to be made between surface topography and the optical signal. For the biological sciences, where sophisticated fluorescence labeling protocols have been developed, the simultaneously collected fluorescence and topography information measured with NSOM offers a potentially powerful tool. The progress in implementing NSOM on unfixed, viable samples, however, has been slowed over concerns regarding sample heating and problems associated with damaging forces generated during imaging. Here, we discuss recent measurements that show sample heating to be modest and not limiting for NSOM applications on viable tissues. In addition, we highlight recent work on developing new NSOM probes that have been demonstrated to be amenable with imaging unfixed samples under buffered conditions. These developments now enable the high resolution of NSOM to be applied to areas in the biological sciences that were previously inaccessible. (JALA 2006;11:268–72)

Surface nanostructuring by femtosecond laser irradiation through near-field scanning optical microscopy

A near-field scanning optical microscopy (NSOM) and a double-frequency femtosecond laser (400 nm, 100 fs) were applied to push the optical resolution further down to sub-50 nm on thin UV photoresist. A 20-nm feature size can be obtained. It is at a resolution of λ/20 ( λ: laser wavelength) and a/2 ( a: NSOM probe aperture diameter), respectively. It is proved that laser power and exposure time can affect feature size of lithography patterns. In this paper, the effect of probe-to-sample distance on dot-pattern features is studied, and different dot-pattern shapes are generated: dumbbell-dot, ellipsoid-dot and circle-dot. The simulated light field spatial distributions across the nano-aperture based on Bethe–Bouwkamp model is found to agree with experimental results very well.

Photoinduced nanodots and pinning effects in Bi2Sr2CaCu2O8+d

We report a fabrication of high-density nanodots by photodoping in overdoped Bi2Sr2CaCu2O8+d thin film (Tc=80K). A scanning near-field optical microscope probe is used to locally excite carrier and photodoped region is associated with lower Tc phase (Tc=75K) via overdoping. Nanoscale characterizations with optical reflectivity reveal that nanodots (30-nm-diameter) are regularly distributed in 50nm step. The resultant films with photoinduced nanodots enhance Jc (at least 5 times larger than the initial one), a situation being similar to strong pinning effects observed in films modified by either ion irradiation or sputtered nanoparticles. These results suggest that photoinduced nanodots with lower Tc act as effective pinning centers.

Analysis of mode coupling due to spherical defects in ideal fully metal-coated scanning near-field optical microscopy probes

We investigate the effect of defects in the metal-coating layer of a scanning near-field optical microscopy (SNOM) probe on the coupling of polarization modes using rigorous electromagnetic modeling tools. Because of practical limitations, we study an ensemble of simple defects to identify important trends and then extrapolate these results to more realistic structures. We find that a probe with many random defects will produce a small but significant coupling of energy between a linearly polarized input mode and a radial/longitudinal polarization mode, which is known to produce a strongly localized emitted optical field and is desirable for SNOM applications.

Effect of Etchant Diffusion on Tip Profiles of Glass Fiber Probes

The tips of the probes are the key components in scanning probe microscopes and their applications in nano-scale imaging and nanofabrications. We investigated first the change of near-field scanning optical microscopy probe tips from optical fiber against time by chemical static etching. Several coverlayer-hydrofluoric acid aqueous solution systems and their possible factors affecting the tips' profile were studied. Tips with shorter tapers, larger conical aperture angles, and reproducible shapes were successfully obtained in high yields. It was found that the taper profiles were affected to a great extent by the one-dimensional linear diffusion of etchants in the coverlayer caused by concentration gradients and convection.

Method to compensate for fluctuations in optical power delivered to a near-field scanning optical microscope

Near-field scanning optical microscopy (NSOM) is a scanning probe technique that uses a tapered optical fiber to probe optical characteristics of a surface in registry with topography. Light can either be injected into the sample or collected from the sample via the subwavelength aperture formed at the tip of the probe. While operating in injection mode, variations in the optical power delivered to the probe, and consequently variations in the optical flux through the aperture, place limits on the imaging of spatial variations in optical properties. We present a novel method utilizing bend loss in an optical fiber to correct for variations in the optical flux of the aperture of a NSOM probe.

The optimal form of the scanning near-field optical microscopy probe with subwavelength aperture

A theoretical approach to determine the optimal form of the near-field optical microscope probe is proposed. An analytical expression of the optimal probe form with subwavelength aperture has been obtained. The advantages of the probe with the optimal form are illustrated using numerical calculations. The conducted calculations show 10 times greater light throughput and the reception possibility of the more compactly localized light at the output probe aperture which could indicate better spatial resolution of the optical images in near-field optical technique using optimal probe.

Ablation of thin metal films by short-pulsed lasers coupled through near-field scanning optical microscopy probes

Short-pulsed lasers have been proven to be useful tools for precise modification of electronic materials. In conventional lens focusing schemes, the minimum feature size is determined by the diffraction limit. Finer resolution is accomplished by combining pulsed laser radiation with near-field scanning optical microscopy (NSOM) probes. In this study, short laser pulses are coupled to a fiber-based NSOM in order to ablate thin metal films. A detailed parametric study on the effects of probe aperture size, laser pulse energy, temporal width, and environment gas is performed. The significance of lateral thermal diffusion is highlighted and the dependence of the ablation process on the imparted near-field distribution is revealed.

Near-Field Scanning Optical Nanolithography with Surface-Wave Enhanced Probes

An optical approach to nano-patterning using near field scanning optical microscopy (NSOM) is presented. Using an NSOM specifically designed for patterning 4 inch wafers, we have demonstrated sub-100 nm feature sizes in conventional i-line photoresists, optical patterning of a-Si:H based resists, and patterning over large distances without stitching errors. A series of test structures were also fabricated including quantum point contacts and micro crystallite arrays. Novel NSOM probes based on excitation of surface plasmon polaritons are also being explored. The higher throughput and lower damage threshold possible with this approach suggests a significant increase in write speed over conventional NSOM probes can be achieved.

Sample heating in near-field scanning optical microscopy

Heating near the aperture of aluminum coated, fiber optic near-field scanning optical microscopy probes was studied as a function of input and output powers. Using the shear-force feedback method, near-field probes were positioned nanometers above a thermochromic polymer and spectra were recorded as the input power was varied. Excitation at 405 nm of a thin polymer film incorporating perylene and N-allyl-N-methylaniline leads to dual emission peaks in the spectra. The relative peak intensity is temperature sensitive leading to a ratiometric measurement, which avoids complications based solely on intensity. Using this method, we find that the proximal end of typical near-field probes modestly increase in temperature to 40–45 °C at output powers of a few nanowatts (input power of ∼0.15mW). This increases to 55–65 °C at higher output powers of 50 nW or greater (input power of ∼2–4mW). Thermal heating of the probe at higher powers leads to probe elongation, which limits the heating experienced by the sample.

Subwavelength imaging of field confinement in a waveguide-integrated photonic crystal cavity

A photonic crystal microcavity is designed to obtain an original field distribution inside the cavity and the structure is etched inside a silicon-on-insulator waveguide. Spectral location of the photonic band gap and cavity resonance are identified by using transmittance measurements and by analyzing the light collected by a scanning near-field optical microscope probe exactly positioned on the center of the cavity. The results obtained with the two techniques are in very good agreement. Then the near-field distribution above the device is mapped and light confinement inside the cavity is evidenced. Moreover, this confined light presents some remarkable patterns which clearly correspond to the cavity mode field distribution computed by using a plane-wave expansion method and taking into account the probe resolution.

Nanoscale Rapid Melting and Crystallization of Semiconductor Thin Films

The current study details nanosecond laser-based rapid melting and crystallization of thin amorphous silicon (a-Si) films at the nanoscale using two different optical near-field processing schemes. Both apertureless and tapered fiber near-field scanning optical microscope probes were utilized to deliver highly confined irradiation on the target surface. The various modification regimes produced as a result of the rapid a-Si melting and crystallization transformations were shown to critically depend on the applied laser fluence. Consequently, the crystallized pattern morphology and feature size could be finely controlled. High energy density was observed to impart ablation surrounded by a narrow melt ring. At much lower incident laser energy density, single nanostructures with a lateral dimension of approximately 90 nm were defined.

The ultrasonic/shear-force microscope: Integrating ultrasonic sensing into a near-field scanning optical microscope

An ultrasonic transducer is incorporated into a near-field scanning optical microscope (NSOM) to augment its versatility to characterize the properties of layers adsorbed to a sample’s surface. Working under typical NSOM operation conditions, the ultrasonic transducer—attached underneath the sample—demonstrates sufficient sensitivity to monitor the waves generated by the tapered NSOM probe that oscillates in the proximity of, and parallel to, the sample’s top surface. This capability makes the newly integrated ultrasonic/shear-force microscope a valuable diagnostic tool in the study of sliding friction and surface phenomena in general. Here, it is used to concurrently and independently monitor the effects that probe-sample interactions exert on the probe (that is attached to a piezoelectric tuning fork) and on the sample (that is attached to the ultrasonic transducer). The signal from the tuning fork (TF) constitutes the so called “shear-force” signal, widely used in NSOM as a feedback to control the probe’s vertical position but whose working mechanism is not yet well understood. Tests involving repeated vertical z motion of the probe towards and away from the sample’s surface reveal that the TF and ultrasonic (US) signals have distinct z dependence. Additionally, where the TF signal showed abrupt changes during the approach, the US changed accordingly. A shift in the probe’s resonance frequency that depends on the probe-sample distance is also observed through both the TF and the US responses. Within the sensitivity of the apparatus, ultrasonic signals were detected only at probe-sample distances where the probe’s resonance frequency had shifted significantly. These measured signals are consistent with a probe entering and leaving a viscoelastic fluid-like film above the sample. The film acts as the medium where waves are generated and coupled to the ultrasonic sensor located beneath the sample. To our knowledge, this is the first reported use of ultrasonic detection for detailed monitoring of the distance dependence of probe-sample interactions, and provides direct evidence of sound as an energy dissipation channel in wear-free friction. This newly integrated ultrasonic/shear-force microscope, which can be implemented with any functionalized proximal probe (including aperture and apertureless NSOM), can become a valuable metrology tool in surface science and technology.

Vector near-field calculation of scanning near-field optical microscopy probes using Borgnis potentials as auxiliary functions

A new boundary integral equation method for solving the near field in three-dimensional vector form in scanning near-field optical microscopy (SNOM) using Borgnis potentials as auxiliary functions is presented. A boundary integral equation of the electromagnetic fields, expressed by Borgnis potentials, is derived based on Green's theorem. The harmonic expansion in rotationally symmetric SNOM probe--sample systems is studied, and the three-dimensional electromagnetic problem is partly simplified into a two-dimensional one. The boundary conditions of Borgnis potentials both on dielectric boundaries and on perfectly conducting boundaries are derived. Relevant algorithms were studied, and a computer program was written. As an example, a SNOM probe-sample system composed of a round metal-covered probe and a sample with a flat surface has been numerically studied, and the computational results are given. This new method can be used efficiently for other electromagnetic field problems with round subwavelength structures.

Design and fabrication of a microlens on the sidewall of an optical fiber with a metallized 45° end face

We propose a method for designing a self-aligned microlens. We have improved its fabrication by employing metallization on a 45 degrees angled surface of the optical fiber. We designed the focal length of the microlens to be 14.0 microm, considering the dimensions of a scanning near-field optical microscopy (SNOM) probe, and we calculated possible dimensions of diameter and height by the ray-tracing method. The modeling of lens formation was also carried out with two assumptions: no volume change and no movement of peripheral parts of the photoresist (PR) on the substrate during reflow. To fabricate a microlens of diameter 16.0 microm and height 5.0 microm we exposed a coated PR to UV light guided into the optical fiber, followed by optimized reflow of 150 degrees C for 2 min. For this microlens the focal length and the beam waist were 14.0 and 1.4 microm, respectively. This lens can be used for compact optical data storage.

Design of metal-cladded near-field fiber probes with a dispersive body-of-revolution finite-difference time-domain method

A dispersive body-of-revolution finite-difference time-domain method is developed to simulate metal-cladded near-field scanning optical microscope (NSOM) probes. Two types of NSOM probe (aperture and plasmon NSOM probes) are analyzed and designed with this fast method. The influence of the metal-cladding thickness and the excitation mode on the performance of the NSOM probes is studied. We introduce a new scheme of illumination-mode NSOM by employing the plasmon NSOM probe with the TM01 mode excitation. Such a NSOM probe is designed, and we demonstrate its advantages over the conventional aperture NSOM probe by scanning across a metallic object.

Development of a polarization-preserving optical-fiber probe for near-field scanning optical microscopy and the influences of bending and squeezing on the polarization properties

We have characterized the optical properties of a polarization-preserving near-field scanning optical microscopy (NSOM) optical fiber probe, and evaluated the influence of probe fabrication processes, such as melting-pulling and bending, on those properties. We found that the extinction ratio always decreases on the linearly polarized light parallel to the slow axis, and that the decrease is independent of the direction in which the probe is bent. The most probable cause of the low extinction ratio is the isotropic compression stress occurring when the fiber is squeezed; such stress cancels out the tensile stress applied to the core by stress applicators. Using the polarization-preserving NSOM probe, we observed the optical properties of the propagation light within a polymeric optical waveguide in guide-collection mode, and investigated those properties with various polarization conditions of incident light and probe collection.