We have studied the liquid phase epitaxy growth of KTiOPO 4 on several faces of KTi 1− x Ge x OPO 4 substrates as a function of the crystal face, growth time and level of substitution of Ge by Ti in the substrate. The best quality films were on the {1 0 0} and {2 0 1} faces. Only slight growth steps were observed on these faces in some experiments. The lowest quality of the films was on the {1 1 0} and {0 1 1} faces and the typical defects were hillocks. The worst quality of epitaxial growth was on the {1 0 1} face and pyramidal growth was detected in all cases. There was not observed diffusion of the Ge from the substrates to the film and the maximal change in refractive indices between substrate and film was of the order of 0.01.
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