Surface Reaction Kinetics Research Articles

Strategy for the Preparation of ZnS/ZnO Composites Derived from Metal-Organic Frameworks toward Lithium Storage.

The synergistic effect between multicomponent electrode materials often makes them have better lithium storage performance than single-component electrode materials. Therefore, to enhance surface reaction kinetics and encourage electron transfer, using multicomponent anode materials is a useful tactic for achieving high lithium-ion battery performance. In this article, ZnS/ZnO composites were synthesized by solvothermal sulfidation and calcination, with the utilization of metal-organic frameworks acting as sacrificial templates. From the point of material design, both ZnS and ZnO have high theoretical specific capacities, and the synergistic effect of ZnS and ZnO can promote charge transport. From the perspective of electrode engineering, the loose porous carbon skeleton that results from the calcination of metal-organic frameworks can enhance composite material conductivity as well as full electrolyte penetration and the area of contact between the electrolyte and active material, all of which are beneficial to enhancing lithium storage performance. As expected, ZnS/ZnO anode materials displayed remarkably high specific capacities and outstanding performance at different rates. Combining material design and electrode engineering, this paper provides another idea for preparing anode materials with excellent lithium storage properties.

Electrochemical and Plasmonic Detection of Myocardial Infarction Using Microfluidic Biochip Incorporated with Mesoporous Nanoscaffolds.

This paper reports a microfluidic device for the electrochemical and plasmonic detection of cardiac myoglobin (cMb) and cardiac troponin I (cTnI) with noticeable limits of detection (LoD) as low as a few picograms per milliliter (pg/mL) ranges, achieved in a short detection time. The device features two working electrodes, each with a mesoporous Ni3V2O8 nanoscaffold grafted with reduced graphene oxide (rGO) that improves the interaction of diffusing analyte molecules with the sensing surface by providing a high surface area and reaction kinetics. Electrochemical studies reveal sensitivities as high as 9.68 μA ng/mL and a LoD of 2.0 pg/mL for cTnI, and 8.98 μA ng/mL and 4.7 pg/mL for cMb. Additionally, the surface plasmon resonance (SPR) studies demonstrate a low-level LoD of 8.8 pg/mL for cMb and 7.3 pg/mL for cTnI. The dual-modality sensor enables dynamic tracking of kinetic antigen-antibody interactions during sensing, self-verification through providing signals of two modes, and reduced false readout. This study demonstrates the complementary nature of the electrochemical and SPR modes in biosensing, with the electrochemical mode being highly sensitive and the SPR mode providing superior tracking of molecular recognition behaviors. The presented sensor represents a significant innovation in cardiovascular disease management and can be applied to monitor other clinically important biomolecules.

Covalently Linking Reduced Graphene Oxide Facilitated Electrodeposition of MoS2 on Silicon Pyramidal Photocathode To Enhance Hydrogen Evolution.

In recent years, increasing attention has been paid to photoelectrochemical (PEC) hydrogen production owing to the utilization of sustainable solar energy and its promising performance. Silicon-based composites are generally considered ideal materials for PEC hydrogen production. However, slow reaction kinetics and poor stability are still key factors hindering the development of silicon-based photoelectrocatalysts. Herein, we present an n+-p Si pyramidal photocathode assembly method to load reduced graphene oxide (rGO) onto the surface of the n+-p Si pyramid by covalently linking (Si/rGO). rGO is utilized as a conductive layer to reduce the interfacial charge-transfer resistance. Then, MoS2 can be successfully electrodeposited on the surface of Si/rGO to form the Si/rGO/MoS2 composite, which possesses excellent PEC hydrogen evolution performance with a high and stable photocurrent of -41.6 mA cm-2 and a hydrogen evolution rate of about 18.1 μmol min-1 cm-2 under 0 V (vs RHE). The covalently linking rGO layer effectively enhances the transfer of photogenerated carriers between the Si substrate and MoS2. MoS2 provides abundant hydrogen evolution active sites, which accelerate the surface reaction kinetics, as well as a protective layer for the Si pyramidal array structure. This work provides a low-cost, convenient, and efficient way of preparing silicon-based photocathodes.

In situ construction of core-shell NiFe-LDH@ZnIn2S4 direct Z-scheme heterojunction for facilitating photocatalytic H2 evolution

The development of photocatalysts with non-noble metals and the effective separation of photoexcited carriers is a significant strategy for accelerating surface reaction kinetics and promoting water splitting to produce H2. Herein, an exquisite core-shell NiFe-LDH@ZnIn2S4 heterojunction photocatalyst was constructed by in situ decoration of ultrathin ZnIn2S4 nanosheets on the surface of the flower-like NiFe-LDH microsphere. The synthesized 3D hierarchical NiFe@ZIS-25 composite exhibits enhanced photocatalytic H2 evolution activity, reaching 9.12 mmol·h-1·g-1, which is 2.52-fold higher than pure ZnIn2S4. The significant improvement in H2 evolution performance could be attributed to the hierarchical core-shell structure of the NiFe@ZIS-25 photocatalyst, which enhanced the light capture ability. In addition, the interfacial coupling effect of ZnIn2S4 and NiFe-LDH is beneficial to the migration of carriers. More importantly, the construction of Z-scheme heterojunction efficiently promotes the fast translation of photogenerated carriers while preserving a stronger reduction potential to achieve H2 evolution. This work elucidates a rational strategy to develop efficient photocatalysts with hierarchical core-shell structures for water splitting.

C3N5 nanosheets decorated with Cu–Pt alloy nanoparticles toward efficient photocatalytic hydrogen evolution

The construction of highly efficient photocatalysts for generating high-purity hydrogen (H2) through a sustainable water decomposition system is a feasible option to replace conventional non-renewable energy resources. Here, we report a simple chemical reduction approach to embed Cu–Pt alloy nanocrystals on the C3N5 (CN) matrix, creating a Schottky heterojunction. The structural morphology, crystal phase, light-harvesting capacity, and photo-electrochemical properties of as-prepared heterostructures were investigated. The uniformly anchored Cu–Pt alloy nanocrystals improve the photocatalytic H2 evolution (PHE) activity by promoting the separation and transfer of photogenerated carriers and inhibiting recombination. Meanwhile, the alloyed nanocrystals strengthen the absorption of incident light energy, inducing photothermal energy. This improves the charge carrier separation and promotes the surface reaction kinetics. The PHE performance of as-developed catalysts could be adjusted by optimizing the molar ratio of Cu/Pt ions. Among them, the optimal Cu1Pt3/CN photocatalyst yields a higher PHE performance (672.85 μmol g−1 h−1). Notably, the Cu1Pt3/CN catalyst also reveals an enhanced photocatalytic activity for H2 evolution in natural seawater. The possible PHE mechanism in CuPt/CN heterostructures is discussed toward the role of CuPt alloy deposition in boosting photocatalytic efficiency.

Preparation of core–shell structured Bi2S3@Co1-xS nanorods with heterojunction as anode materials for lithium-ion batteries

Metal sulfides (MSs) have been extensively studied in the fields of photochemical or electrochemical energy conversion and storage. Herein, core–shell structured Bi2S3@Co1-xS nanorods with heterojunction (CSBCNs) were synthesized for the first time by a facile hydrothermal method and applied in lithium-ion batteries (LIBs). The unique nanosized core–shell structure with heterojunction enhances the surface reaction kinetics and facilitates ions and charges transfer. Moreover, it can also weaken the agglomeration of the active materials and alleviate their volume change. Compared with pure Bi2S3 nanorods, Co1-xS, and Bi2S3/Co1-xS composites, CSBCNs exhibited much better cycling performance and rate capability.

The construction of Cs3MoxSbyBr9/BiVO4 S-scheme heterojunction photocatalyst for efficient photocatalytic N2 fixation

Synergistic nitrogen (N2) reduction with water (H2O) oxidation is meaningful but challenging owing to the inertness of the N2 molecule and the sluggish kinetics of H2O oxidation. Herein, a simutaneous-promotion strategy of redox capacities is presented for constructing a lead-free Cs3Sb2Br9-based S-scheme heterojunction, by decorating Mo-functionalized Cs3Sb2Br9 nanocrystals (Cs3MoxSbyBr9) on BiVO4 nanosheet through an in-situ plane-to-point growth manner. The Mo-functionalization for Cs3Sb2Br9 enables the regulation of the d-band center position, greatly improving surface reaction kinetics for N2 reduction. Furthermore, the construction of the S-scheme heterojunction enhances the driving force for H2O oxidation and spatial charge separation of photocatalysts. As anticipated, the resultant Cs3MoxSbyBr9/BiVO4 exhibits an excellent photocatalytic N2 reduction activity under ambient atmosphere, achieving ammonia (NH3) production at a rate of 300 ± 5 μmol g−1 h−1 under simulated sunlight illumination (100 mW cm−2), which is nearly 20-fold higher than that of pristine Cs3Sb2Br9.

Enhanced photoelectrochemical water splitting by a 3D hierarchical sea urchin-like structure: ZnO nanorod arrays on TiO2 hollow hemisphere

A hierarchical sea urchin-like hybrid metal oxide nanostructure of ZnO nanorods deposited on TiO2 porous hollow hemispheres with a thin zinc titanate interface layer is specifically designed and synthesized to form a combined type I straddling and type II staggered junctions. The HHSs, synthesized by electrospinning, facilitate light trapping and scattering. The ZnO nanorods offer a large surface area for improved surface oxidation kinetics. The interface layer of zinc titanate (ZnTiO3) between the TiO2 HHSs and ZnO nanorods regulates the charge separation in a closely coupled hierarchy structure of ZnO/ZnTiO3/TiO2. The synergistic effects of the improved light trapping, charge separation, and fast surface reaction kinetics result in a superior photoconversion efficiency of 1.07% for the photoelectrochemical water splitting with an outstanding photocurrent density of 2.8 mA cm−2 at 1.23 V versus RHE.

Accelerating Surface Reaction Kinetics and Enhancing Bulk as well as Surface Charge Carrier Dynamics in Al/ Al2O3‐Coated BiVO4 Photoanode

AbstractPhotoelectrochemical (PEC) hydrogen evolution from water splitting of semiconductor photoanodes is intricately linked to their light‐absorbing capacity, surface reaction kinetics, bulk charge carrier separation efficiency, and surface charge carrier injection efficiency. Harnessing the surface plasmon resonance effect of metals emerges as a promising approach to enhance PEC performance of semiconductor photoanodes. This work presents the first application of non‐noble metal Al nanoparticles to sensitize a BiVO4 nanoporous film (NPF) photoanode. This process significantly expedites the surface kinetics of water oxidation, and improves both bulk charge carrier separation and surface carrier injection efficiencies of BiVO4 NPF photoanode. Additionally, the surface‐formed Al2O3 film effectively preserves the stability of photoanode, leading to a substantial improvement in PEC hydrogen evolution of BiVO4 NPF photoanode in a three‐electrode PEC cell with sulfite scavenger. The constructed BiVO4/Al NPF heterojunction photoanode exhibits a hydrogen evolution rate of 73.9 µmol cm⁻2 h⁻¹ at 1.23 V versus reversible hydrogen electrode, 1.68 times of BiVO4 photoanode. Additionally, BiVO4/Al NPF photoanode exhibits excellent stability under long‐time light irradiation of 8 h. This study provides valuable insights into the design of nonnoble‐metal‐based plasmonic photoanodes for efficient hydrogen generation through PEC cell from the perspectives of surface reaction kinetics, charge carrier injection, and separation.

Defect Engineering Simultaneously Regulating Exciton Dissociation in Carbon Nitride and Local Electron Density in Pt Single Atoms Toward Highly Efficient Photocatalytic Hydrogen Production.

The high exciton binding energy (Eb) and sluggish surface reaction kinetics have severely limited the photocatalytic hydrogen production activity of carbon nitride (CN). Herein, a hybrid system consisting of nitrogen defects and Pt single atoms is constructed through a facile self-assembly and photodeposition strategy. Due to the acceleration of exciton dissociation and regulation of local electron density of Pt single atoms along with the introduction of nitrogen defects, the optimized Pt-MCT-3 exhibits a hydrogen production rate of 172.0µmolh-1 (λ ≥ 420nm), ≈41 times higher than pristine CN. The apparent quantum yield for the hydrogen production is determined to be 27.1% at 420nm. The experimental characterizations and theoretical calculations demonstrate that the nitrogen defects act as the electron traps for the exciton dissociation, resulting in a decrease of Eb from 86.92 to 43.20meV. Simultaneously, the stronger interaction between neighboring nitrogen defects and Pt single atoms directionally drives free electrons to aggregate around Pt single atoms, and tailors the d-band electrons of Pt, forming a moderate binding strength between Pt atoms and H* intermediates.

The influence of the mass transport regime on laser chemical vapor deposited carbon fibers

Laser Chemical Vapor Deposition (LCVD) is a process through which fibers are additively deposited by the dissociation and deposition of a precursor gas into the solid phase under a translating laser focal point. In the hyperbaric pressure conditions, LCVD has two identified reaction regimes. The first being limited by surface reaction kinetics (SRK) and the second being limited by mass transport (MT). This article examines the effects of mass transport (MT) limitations on carbon fiber growth using either ethane (C2H6) or ethylene (C2H4). Both hydrocarbon precursors reveal a growth rate reduction when transitioning from SRK-to-MT to meet the no-slip condition in fluid dynamics. This transition correlates to a fiber microstructure change from a core shell morphology with a graphitic structure (SRK) to a nodular morphology with an amorphous structure (MT). The fiber fracture stress is generally found to be higher in the MT than SRK regime because of the reduction of easily cleaved graphitic planes in the MT fibers. Collectively, these results demonstrate the importance of the MT limited growth regime and how fiber characteristics can be manipulated when grown in this regime.

S-scheme NiO/C3N5 heterojunctions with enhanced interfacial electric field for boosting photothermal-assisted photocatalytic H2 and H2O2 production

Heterostructured visible-light-responsive photocatalysts represent a prospective approach to achieve efficient solar-to-chemical energy conversion. Herein, we propose a facile self-assembly technique to synthesize NiO nanoparticles/C3N5 nanosheets (NOCN) heterojunctions for hydrogen (H2) evolution catalysis and hydrogen peroxide (H2O2) production under visible light. In this regard, the black NiO nanoparticles (NPs) were tightly anchored on the surface of C3N5 nanosheets (CNNS) to construct S-scheme NOCN heterojunction, enabling efficient charge separation and high redox capability. Obtained results elucidated that the incorporated NiO NPs significantly promote light-harvesting efficiency and photo-to-thermal capacity over the NOCN composites. The enhanced photothermal effect facilitates the charge carrier transfer rate across the heterojunction and boosts the surface reaction kinetics. Accordingly, the photocatalytic performances of CNNS for H2 release and H2O2 production can be manipulated by introducing NiO NPs. The modified photocatalytic properties of NOCN composites are ascribed to the synergistic effects of all integrated components and the S-scheme heterojunction formation. Impressively, the high H2 evolution photocatalysis efficiency of NOCN nano-catalysts in seawater certifies their potential environmental applicability. Among all, the 12-NOCN nano-catalyst exhibits a higher photocatalytic efficiency for H2 release (112.2 μmol∙g−1∙h−1) and H2O2 production (91.2 μmol∙L−1∙h−1). Besides, the 12-NOCN nano-catalyst reveals excellent recyclability and structural stability. Additionally, the possible mechanism for photothermal-assisted photocatalysis is proposed. This work affords a feasible pathway to design photothermal-assisted S-scheme heterojunctions for diverse photocatalytic applications.

Multiobjective‐Optimization MoS2/Cd‐ZnIn2S4/CdS Composites Prepared by In Situ Structure‐Tailored Technique for High‐Efficiency Hydrogen Generation

Photocatalytic water splitting into hydrogen production provides a new avenue to produce clean chemical fuels. However, developing high‐efficiency photocatalytic materials still remains a challenge till now. Herein, multiobjective‐optimization MoS2/Cd‐ZnIn2S4/CdS (MS/CZIS/CS) composites are successfully constructed by an in situ structure‐tailored technique. Benefiting from the synergistic feature integrating sulfur vacancy, II‐type CZIS/CS heterojunction and Schottky‐type MS/CS heterojunction, such composites not only effectively steer photogenerated carrier transfer but also markedly expedite surface reaction kinetics for hydrogen reduction reaction. As a result, an optimal hydrogen evolution rate of 11.49 mmol g−1 h−1 is achieved over the MS/CZIS/CS catalysts, which is approximately 4.79 times higher than that of pristine ZIS (2.40 mmol g−1 h−1). This work provides some new inspirations for the steering of carrier transfer and the design of multiobjective‐optimization photocatalysts with high efficiency.

Interfacial electric field optimization and co-catalyst free LaFeO3-based p-p-type homojunction for efficient PEC water splitting

LaFeO3 (LFO), a typical p-type semiconductor, is considered as a promising material for photoelectric conversion because of its flexible composition and structure. However, its severe photogenerated carrier recombination and surface reaction kinetic hysteresis greatly limit its application in photoelectrochemistry (PEC) water splitting. Here, for the first time, a LFO p-p-type homojunction (Cu-LFO/Ni-LFO) formed by Cu-doped LFO and Ni-doped LFO is reported. Experimental investigation and density functional theory (DFT) calculations reveal that Cu and Ni doping forms a built-in electric field directed from Ni-LFO to Cu-LFO, which effectively improves the carrier separation and transport efficiency. The comparable crystal structure at the interface minimizes the photogenerated carrier recombination due to the interface lattice mismatch. In addition, Ni-LFO in contact with the electrolyte served as a co-catalyst like role in this PEC system, improving the kinetic properties of the surface reaction significantly by optimizing the adsorption and desorption of H2O molecules and HER reaction intermediates on the Fe in the active center whilst significantly reducing the energy barrier. As a result, the photocurrent density of the Cu-LFO/Ni-LFO photocathode reaches 5.94 mA cm2, which is 11 times higher than that of Cu-LFO and surpasses all LFO-based photocathodes reported so far. The LFO-based p-p homo-junction synthesized in this work is instructive for improving the carrier separation efficiency and surface reaction kinetics of LFO.

Actuating Liquid Crystals Rapidly and Reversibly by Using Chemical Catalysis.

Microtubules and catalytic motor proteins underlie the microscale actuation of living materials, and they have been used in reconstituted systems to harness chemical energy to drive new states of organization of soft matter (e.g., liquid crystals (LCs)). Such materials, however, are fragile and challenging to translate to technological contexts. Rapid (sub-second) and reversible changes in the orientations of LCs at room temperature using reactions between gaseous hydrogen and oxygen that are catalyzed by Pd/Au surfaces are reported. Surface chemical analysis and computational chemistry studies confirm that dissociative adsorption of H2 on the Pd/Au films reduces preadsorbed O and generates 1 ML of adsorbed H, driving nitrile-containing LCs from a perpendicular to a planar orientation. Subsequent exposure to O2 leads to oxidation of the adsorbed H, reformation of adsorbed O on the Pd/Au surface, and a return of the LC to its initial orientation. The roles of surface composition and reaction kinetics in determining the LC dynamics are described along with a proof-of-concept demonstration of microactuation of beads. These results provide fresh ideas for utilizing chemical energy and catalysis to reversibly actuate functional LCs on the microscale.

Modelling of transport, adsorption and surface reaction kinetics on Ni, Pd and Ru metallic/acidic catalyst sites during hydrodeoxygenation of furfural

The furfural hydro-treatment process over Ni/Al2O3, Ni/SiO2, Pd/Al2O3, Pd/SiO2, Ru/Al2O3 and Ru/SiO2 was investigated in a three-phase batch reactor operation at 150 °C, 175 °C and 200 °C, 60 barg hydrogen and tetrahydrofuran as solvent. The strength and rate of adsorption and desorption to/from acidic, metallic and interface site structures were determined, using H2 temperature-programmed reduction (H2-TPR), CO (CO-TPD) and NH3 (NH3-TPD) desorption experiments, and subsequent regression analysis of the results by numerical modelling and optimisation. To quantify the contribution of transport, active metal materials and support effect relationship, a generalized micro-kinetic model was postulated, which has been shown to describe experimental result outcomes well. Mechanistic description and regression analysis were applied to evaluate the role of the support (Al2O3 or SiO2) on the catalytic element (Ni, Pd or Ru) atoms, their energy impact on the individual steps and selectivity. Evaluation of morphological and structural characteristics, and sorption or intrinsic reaction kinetics has indicated that the coverage of acidic sites (on alumina or silica) facilitated yielding ring hydrogenation, inhibited deoxygenation, decarbonylation and cyclic compound opening, and supressed etherification. The rates for aromatics or aldehyde functional groups were, nonetheless, affected in a different order. Understanding the chemistry of bio-based furanic derivatives mechanistically is vital and can improve the process of their conversion into of mono- or di-alcohols.

In-situ decorated cobalt phosphide cocatalyst on Hittorf's phosphorus triggering efficient photocatalytic hydrogen production

Hittorf's phosphorus (HP) is a promising visible-light-driven photocatalyst, yet the slow charge migration and sluggish surface reaction kinetics have limited its photocatalytic hydrogen evolution reaction (HER) efficiency. In this work, cobalt phosphide (CoP2) modified rod-like HP (HP/CoP2) composite was designed and synthesized by a template-assisted chemical vapor deposition strategy. The optimal HP/CoP2 composite yields a HER rate reaching 13.1 μmol·h-1 through pure water splitting under visible light irradiation, which is approximately 4 times higher than that of HP using Pt as cocatalyst (3.3 μmol·h-1). It was experimentally indicated that the accelerated photogenerated charge transfer and promoted surface HER kinetics in the composite gave rise to the superior photocatalytic HER performance.

A Superior Catalytic Air Electrode with Temperature-Induced Exsolution toward Protonic Ceramic Cells.

Protonic ceramic cells merit extensive exploration, attributed to their innate capabilities for potent and environmentally benign energy conversion. In this work, a temperature-induced exsolution methodology to synthesize SrCo0.5Nb0.5O3-δ (SCN) nanoparticles (NPs) with notably elevated activity on the surface of PrSrCo1.8Nb0.2O6-δ (PSCN) is proposed, directly addressing the extant challenge of restrained catalytic activity prevalent in air electrode materials. In situ assessments reveal that SCN NPs commence exsolution from the matrix at temperatures surpassing 900 °C during straightforward calcination processes and maintain stability throughout annealing. Notably, the resultant SCN-PSCN interface facilitates vapor adsorption and protonation processes, which are poised to enhance surface reaction kinetics pertaining to the proton-involved oxygen reduction and evolution reaction (P-ORR and P-OER). A fuel-electrode-supported protonic ceramic cell leveraging SCN-PSCN as the air electrode manifests compelling performance, attaining a peak power density of 1.30 W·cm-2 in the fuel cell modality and a current density of 1.91 A·cm-2 at 1.3 V in the electrolysis mode, recorded at 650 °C. Furthermore, density functional theory calculations validate that the introduction of SCN NPs onto the PSCN surface conspicuously accelerates electrode reaction rates correlated with P-ORR and P-OER, by significantly mitigating energy barriers associated with surface oxygen and vapor dissociation.

Recent Advances in Diverse MXenes‐Based Structures for Photocatalytic CO2 Reduction into Renewable Hydrocarbon Fuels

AbstractPhotocatalytic CO2 reduction into renewable hydrocarbon fuels is a green solution to address CO2 emission and energy issues simultaneously. However, the fast recombination of photogenerated charge carriers and the sluggish surface reaction kinetics restrict the efficiency of photocatalytic CO2 reduction. The emergence of 2D MXenes has potential in improving the efficiency of photocatalytic CO2 reduction, owing to their high electrical conductivity, flexible structural properties, and abundant active sites. Hence, this review will concisely summarize and highlight recent advances of MXenes‐based photocatalysts used in photocatalytic CO2 reduction. First, the synthesis and properties of MXenes is briefly introduced. Second, the mechanism of CO2 photoreduction along with the roles of MXenes in photocatalytic CO2 reduction are summarized, including promoting the adsorption of CO2, enhancing the separation of photo‐induced charge carriers, acting as a robust support, and photothermal effect. Third, different kinds of MXenes‐based photocatalysts such as MXenes/metal oxides, MXenes/nitrides, MXenes/LDH, MXenes/perovskite, and MXene‐derived photocatalysts for CO2 reduction are classified via the type of semiconductors. Finally, the challenges and perspectives are also presented, including exploring suitable MXenes via machine learning, uncovering the structure‐activity relationship by in situ, time‐ and space‐resolved characterization techniques, improving anti‐oxidization ability, and scale‐up applications.

Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM

The production efficiencies of organic light emitting diode (OLED) displays and semiconductor manufacturing have been dramatically improving with the help of plasma physics and engineering technology by utilizing a process monitoring methodology based on physical domain knowledge. This domain knowledge consists of plasma-heating and sheath physics, plasma chemistry, and plasma-material surface reaction kinetics. They were applied to the plasma information based virtual metrology (PI-VM) algorithm with the plasma diagnostics and noticeably enhanced process prediction performance by parameterizing plasma information (PI) in various processes of OLED display and semiconductor manufacturing fabs. PI-VM has shown superior process prediction accuracy, which can trace the states of processing plasmas as an application of data-driven plasma science compared to the classical statistics and machine learning-based virtual metrologies; thus, various plasma processes have been managed and controlled with the help of the PI-VM models. More than this, we have adopted the PI-VM model to optimize the patterning architecture and plasma processes simultaneously. The best combination of the etching pattern structure and plasma condition was adjustable based on the detailed understanding of the angular distribution of sputtered atoms from the etching target surface and their interaction with the plasma sheath based on the PI-VM modeling for etching profile failure prediction.