Surface morphology, deposition rate (DR), bonding composition, structural, optical and electrical properties of pulsed laser deposited amorphous carbon nitride (a-CN x ) layers using camphoric carbon (C 10H 16O) target precursor as a function of substrate temperatures (STs), laser fluences (LFs) and target to substrate distances (TSDs) are reported. At fixed LF and TSD, surface roughness, particle density and particle size increase, whereas the DR decreases with higher ST. When the TSD and ST are fixed, surface roughness, particle density, deposition rate and nitrogen (N) content increase, whereas particle size decreases with higher LF. While when the LF and ST are fixed, decreasing TSD results in an increase in the irregular small particle size, particle density, surface roughness, DR and N content. The N content in a-CN x layers is found to increase with higher ST up to 400 °C and decrease thereafter. While the increase of LF and decrease of TSD result in an increase in the N content. We found that the amorphous structure of a-CN x layers and the ratio of sp 2 trihedral component to sp 3 tetrahedral component are strongly dependent on ST, LF and TSD. The a-CN x layers with high N content have relatively high electrical resistivity.
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