In the rarefied gas, the gas flows induced by the inhomogeneous temperature fields and the Knudsen force exerting on the immersed structure are potentially applicable to the micro/nano-electromechanical systems (MEMS/NEMS) and aerospace. The system composed of a series of triangle cold beams and rectangle hot beams is proposed, and the effects of the beam geometry, dimensions, and positions for different pressures on rarefied gas flows and Knudsen force are researched based on the direct simulation Monte Carlo (DSMC) method. The results reveal that both the gas flows and Knudsen force are highly sensitive to these factors. Particularly, the applications of triangular cross-section cold beams and large height-to-width ratios are necessary for a larger Knudsen force. Compared to the rectangle cold beam, when the triangle cold beam has an inclination of approximately 20°, the peak value of Knudsen force can increase by 142%. Moreover, Knudsen force monotonically reduces with the distance between the cold and hot beams increasing. However, the effects of the distance between the cold beam and substrate (substrate proximity) on Knudsen force depend on the ambient pressure. In general, an appropriate increase in substrate proximity appears to be a smart way to practically enhance the Knudsen force.
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