This paper presents a physics-based semiempirical model of drain saturation voltage (V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS,SAT</sub> ) of a FinFET device suitable for analog circuit design. The previous belief of similarity of the saturation phenomenon in the FinFET and planar MOSFET devices is investigated for the first time and is shown to be inconsistent in the FinFET device. When the value of V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS</sub> is increased to V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS,SAT</sub> , then at a critical point, the product of electron density (n) and electron velocity (v <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">d</sub> ) starts decreasing at the silicon-dielectric interface while it increases at the mid of the fin. This critical point lies within the drain extension (DE) region near to channel-DE junction. It is also observed that V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS,SAT</sub> increases linearly with V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">GS,</sub> (≥0.6 V). Based on this, a semiempirical V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS,SAT</sub> model is proposed, which is simple enough to be usable in analog circuit design. Moreover, compared to planar devices, a strikingly different trend of the output resistance (r <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">o</sub> ) in FinFET is observed. We explained this behavior for the first time using our understanding of FinFET saturation phenomenon. By employing our semiempirical model of V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS,SAT</sub> and the trend of r <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">o</sub> with V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS</sub> , we estimated the bias voltages of the FinFET amplifier to improve the gain by about 3× while not increasing the power dissipation. Since the gains of cascode and telescopic cascode amplifiers are strongly dependent on r <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">o</sub> , these FinFET amplifiers can be designed to have much smaller overdrive voltages compared to its planar counterparts.
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