AbstractBased on the interface polarization model, the 2D electron gas (2DEG) at LaInO3(LIO)/BaSnO3(BSO) interfaces is understood to originate from a polarization discontinuity at the interface and the conduction band offset between LIO and BSO. In this scenario, the direction of polarization at the interface is determined by whether the first atomic LIO layer at the interface is LaO+ or InO2−. The role of the terminating layer is investigated at the LIO/BSO interface in creating the 2DEG. Based on conductance measurements of the in situ grown LIO/BSO heterostructures, it has been reported in this work that the 2DEG only forms when the BSO surface is terminated mainly with a SnO2 layer. The terminating layer is controlled by additional SnO2 deposition on the BSO surface. It has been shown that the as‐grown BSO surface has a mixed terminating layer of BaO and SnO2 while the BSO surfaces prepared with additional SnO2 deposition are terminated mainly with the SnO2 layer. The terminating layer is confirmed by coaxial impact collision ion scattering spectroscopy. The finding is consistent with the interface polarization model for 2DEG formation at LIO/BSO interfaces, in which the direction of the interfacial polarization in LIO is determined by the terminating layer of the BSO surface.
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