In this paper, the microstructure evolution, mechanical properties, sand erosion performance, and failure mechanism of multilayer TiN/Ti coatings deposited at different substrate temperatures (25 °C, 100 °C, 300 °C, and 500 °C) were investigated. TEM results showed the average columnar grain width of the TiN layer at the four deposited temperatures was 18.4 nm, 30.7 nm, 58.9 nm, and 86.9 nm, respectively. Additionally, a transition from columnar to equiaxed grain morphology was observed in the Ti layer when the deposition temperature was raised to 500 °C. The hardness of TiN/Ti coating decreased from 26 GPa at 25 °C to 22 GPa at 100 °C, 300 °C and 500 °C, which might be attributed to the decreased residual stress with the increase of the deposition temperature. The adhesion force of the deposited coating on the substrate increased firstly, peaked 72 N at 300 °C and then decreased. Sand erosion tests indicated that the sand erosion rate of the TiN/Ti coating initially decreased then rebound as the coating deposition temperature increased. The TiN/Ti coating deposited at 300 °C exhibited the optimal anti-erosion performance. Under a 45° sand erosion incident angle, the top TiN layer cracked and propagated parallelly to the incident angle and intersected, resulting in coating delamination. Under a 90°incident angle, the crack in the soft Ti layer intersected with the annular crack formed in the brittle TiN layer, leading to the removal of the coating.
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