We describe a combined ultrasonic instrument for gas flow metering andcontinuous real-time binary gas composition measurements. The combinedflow measurement and mixture analysis algorithm employs sound velocitymeasurements in two directions in combination with measurements of thepressure and temperature of the process gas mixture.The instrument has been developed in two geometries following extensivecomputational fluid dynamics studies of various mechanical layouts. Aversion with an axial sound path has been used with binary gas flows upto 230 l.min−1, while a version with a sound path angled at45° to the gas flow direction has been developed foruse in gas flows up to 20000 l.min−1.The instrument with the axial geometry has demonstrated a flowresolution of ⩽ 1 % of full scale for flows up to 230 l.min−1and a mixture resolution of 3.10−3 for C3F8/C2F6 molar mixtures with ∼ 20 %C2F6. Higher mixture precision is possible in mixtures ofgases with widely-differing molecular weight (mw): a sensitivity of < 5.10−5 to traces of C3F8 in nitrogen (mw difference 160)has been seen in a long duration ( > 1yr) continuous study.A prototype instrument with 45° crossing angle hasdemonstrated a flow resolution of 1.9 % of full scale for linear flowvelocities up to 15 ms−1.Although this development was motivated by a requirement of the ATLASsilicon tracker evaporative fluorocarbon cooling system, the developedinstrument can be used in many applications where continuous knowledgeof binary gas composition is required. Applications include theanalysis of hydrocarbons, vapour mixtures for semi-conductormanufacture and anaesthetic gas mixtures.
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