With the increasing application of 5G remote ultrasound robots in healthcare, robust methods are in critical demand to assess participant satisfaction and identify its influencing factors. At present, there is limited empirical research on multi-parametric and multidimensional satisfaction evaluation of participants with 5G remote ultrasound robot examination. Previous studies have demonstrated that structural equation modeling (SEM) effectively integrates various statistical techniques to examine the relationships among multiple variables. Therefore, this study aimed to evaluate the satisfaction of participants with 5G remote ultrasound robot examination and its influencing factors using SEM. Between April and June 2022, 213 participants from Wuhan Automobile Manufacturing Company underwent remote ultrasound examinations using the MGIUS-R3 remote ultrasound robot system. After these examinations, the participants evaluated the performance of the 5G remote ultrasound robot based on their personal experiences and emotional responses. They completed a satisfaction survey using a self-developed questionnaire, which included 19 items across five dimensions: examination efficiency, examination perception, communication perception, value perception, and examination willingness. A SEM was established to assess the satisfaction of participants with the 5G remote ultrasound robot examinations and the influencing factors. A total of 201 valid questionnaires were collected. The overall satisfaction of participants with the 5G remote ultrasound robot examination was 45.43 ± 11.60, with 169 participants (84%) expressing satisfaction. In the path hypothesis relationship test, the dimensions of examination efficiency, examination perception, communication perception, and value perception had positive effects on satisfaction, with standardized path coefficients of 0.168, 0.170, 0.175, and 0.191. Satisfaction had a direct positive effect on examination willingness, with a standardized path coefficient of 0.260. Significant differences were observed across different educational levels in the dimensions of examination perception, communication perception, value perception, and examination willingness. Participants with different body mass indices also showed significant differences in examination perception; all p-values were less than 0.05. In this study, value perception was identified as the most significant factor influencing satisfaction. It could be improved by enhancing participants' understanding of the accuracy and safety of 5G remote ultrasound robot examinations. This enhances satisfaction and the willingness to undergo examinations. Such improvements not only facilitate the widespread adoption of this technology but also promote the development of telemedicine services.