FinFET technology has become an attractive candidate for high-performance and power-efficient applications. In the other hand, the behavior of FinFET devices is influenced by self-heating effect (SHE) due to its 3D structure, low thermal coupling and quantum confinement effect, among others. SHE degrades the device’s performance and could worsen reliability mechanisms like NBTI. In addition, some hard-to-detect open defects in FinFET based-circuits using logic gates designed with multi-fin and multi-finger techniques may escape the test and present abnormal static currents, which may increase the impact of self-heating effect and make the NBTI degradation more severe. Hence, it is crucial to accurately determine the temperature profiles of those chips passing the test and presenting abnormal static currents. This paper investigates the reliability of chips passing the test with abnormal static currents using Sentaurus Technology Computer-Aided Design (TCAD). FinFET transistors are calibrated with Intel 14-nm FinFET technology. Our TCAD simulation framework determines accurately the temperature and NBTI degradation. Using the TCAD information, the device degradation over time can be predicted. Moreover, the delay penalization of a critical logic path of an ISCAS benchmark circuit is investigated. The delay penalization of logic paths, attributed to the defect and NBTI, is analyzed with varying logic depths, emphasizing the importance of addressing critical paths with different logic depths. Our study leads to new considerations for improving the prediction of circuit reliability and taking countermeasures.