Abstract

Bi 3.54 Nd 0.46 Ti 3 O 12 (BNdT) thin films have been deposited on p-type Si(100) substrates by a sol-gel method. The microstructures of the film were examined by X-ray diffractometer and scanning electron microscope. The C-V characteristic hysteresis curves show that the metal/ferroelectric/semiconductor structure has memory effect. The fixed charge density (Nfc), surface state density (Nss) and activation energies (Ea1 and Ea2) were also calculated by using a high-low frequency method and thermally stimulated currents measurement. The calculated Nfc,Nss, E a1 and E a2 values were 2.9 × 10 11 cm −2 , 1 × 10 12 cm −2 eV −1 , 1.16 eV and 0.04 eV, respectively. From the results, it is expected that the BNdT films have promising applications as ferroelectric field effect transistor for nonvolatile ferroelectric random access memories.

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