Abstract
This paper describes the innovative design of a three-dimensional (3D) motion device based on a flexible mechanism, which is used primarily to produce accurate and fast micro-displacement. For example, the rapid contact and separation of the tool and the workpiece are realized by the operation of the 3D motion device in the machining process. This paper mainly concerns the device performance. A theoretical model for the static performance of the device was established using the matrix-based compliance modeling (MCM) method, and the static characteristics of the device were numerically simulated by finite element analysis (FEA). The Lagrangian principle and the finite element analysis method for device dynamics are used for prediction to obtain the natural frequency of the device. Under no-load conditions, the dynamic response performance and linear motion performance of the three directions were tested and analyzed with different input signals, and three sets of vibration trajectories were obtained. Finally, the scratching experiment was carried out. The detection of the workpiece reveals a pronounced periodic texture on the surface, which verifies that the vibration device can generate an ideal 3D vibration trajectory.
Highlights
The flexible hinge motion platform has significant advantages such as high transmission efficiency, non-backlash, high resolution and high motion accuracy
Ways to increase the size of the flexible hinge to increase the bandwidth of the device are used in designing nanopositioning modules for high-throughput nanomanufacturing applications [7]
The decoupled positioning platform with compound parallelogram flexures and a compound bridge-type displacement amplifier is more suitable for the field of microscopic operation [8]
Summary
The flexible hinge motion platform has significant advantages such as high transmission efficiency, non-backlash, high resolution and high motion accuracy. Through the analysis of the influence of the quality and quantity of hinges on the performance of fast tool servo systems, it has been found that the single-hinge fast tool servo structure is more suitable for precision machining of the roll mold [11] These areas require flexible devices with a wide range, high precision, high resolution, high reliability, and multiple degrees of freedom [12,13]. The application of a flexible mechanism in ultra-precision positioning platforms, electron microscopes and other precision instruments, requires that the motion device has a wide operational range [14,15]. The flexible hinge mechanism requires the motion device to have high operational accuracy in applications such as micro gripper, micro-electro-mechanical system MEMS assembly, cell injection and other precision instruments. For motion platforms based on the flexible mechanism, a lot of research and exploration has been done on the range of motion, motion accuracy and natural frequency. Calculation of Output Flexibility Using the MCM Method (1) Output Flexibility in the x and y Directions
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