Modeling and Analysis of a Novel Decoupled Vibration-Assisted Swing Cutting System for Micro/Nano-Machining Surface

Abstract

The flexure-based motion platform with high-positioning precision and fast response is really attractive for the realization of micro/nano-machining surface. However, coupling motion effect existed in most positioning systems, which will induce the asymmetry and incline deformation and lead to a poor processing quality. To alleviate this problem, we proposed a decoupled vibration-assisted swing cutting (VASC) system driven by two piezoelectric actuators in this paper. A double symmetric L-shaped parallel flexure hinge with decoupled actuation and decoupled output motion has been designed in this system. In order to analyze the effect of the parameter variation to the system, the kinematics, statics, and dynamics properties of the VASC system were modeled by the geometrical method, matrix-based compliance modeling, and Lagrangian principle, respectively. Meanwhile, we have validated the effect of the parameter variation for angle-position trajectory, output stiffness, and natural frequencies by simulation analysis. In addition, the decoupled performance could be determined by finite-element analysis. In the view of the decoupling property, the result shows that the motion stroke of the input end can reach up to $15.67~\mu \text{m}$ , and the coupling ration has effectively decreased to 1.27%. Both analysis and experiment have verified the decoupled properties of VASC that have proved the effectiveness of the present VASC system for micro/nano-machining surface.