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Abstract
SrTiO3 thin films with thicknesses ranging from 30 nm to 60 nm were grown on 6-inch-diameter, platinized Si wafers by liquid source metal-organic chemical vapor deposition (MOCVD). The crystalline quality and cation concentrations of the films are strongly dependent on the deposition temperature with optimum temperatures ranging from 500° C to 550° C. Semi-conformal deposition on submicron-sized storage node patterns is obtained but further improvements in conformality and reproducibility are required. The dielectric constant is about 210 irrespective of the film thickness and leakage current densities are sufficiently small for the dynamic random access memory (DRAM) applications. SiO2 equivalent thickness (T ox) of the 30-nm-thick STO film is 0.51 nm. The finding that the leakage current density and dielectric constant are independent of the film thickness can be explained by a fully depleted model of the STO film.
Published Version
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