Abstract
Abstract Toward the simultaneous high-resolution imaging of chemical transmitters, we developed the formation process of Au electrodes functioning as neurotransmitter-sensitive regions to each pixel on the 4.19-µm pitch CMOS sensor array deposited with titanium nitride (TiN). Using semiconductor lithography, the Au electrode smaller than a pixel size was successfully patterned every pixel in a grid on the array. The resulting sensor showed a good sensitivity of 50.2 mV/dec for redox potential and 62.6 mV/pH with a reasonable selectivity. Furthermore, the clear output image which reflects the Au-electrode pattern was observed in response to the redox- and pH-change and demonstrated the spatial resolution of the multichemical image sensor was improved. Our developed multichemical biosensor array with high spatial resolution can be used for simultaneous neurotransmitter and H+ imaging as a sensing platform in future bioimaging applications.
Published Version
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