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Open Accesshttps://doi.org/10.1088/1757-899x/498/1/012034
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Cite Publication Date: Mar 1, 2019 | |
 Citations: 3 |  License type: cc-by |
The article discusses technological and economic aspects of small-scale production of gas MOX sensors. The main technical factors affecting the use of sensors in various applications are described. The perspective laser micro-milling technology for ceramic MEMS producing of microhotplate and SMD package for the MOX sensor is discussed.
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