Abstract
The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison with classical clean room technologies using for mass production MEMS devices. The main technical factors affecting on using MOX sensors in various applications are presented. Current results demonstrate that using described technology possible to manufacturing all parts of MOX gas sensor in the SMD form-factor SOT-23 package type.
Highlights
IntroductionThe modern metal oxide (MOX) sensor is a combination of several factors – a microhotplate (responsible for power consumption and temperature operation mode), MOX gas sensitive layer (responsible for sensitivity to target gases) and a package (responsible for the possible applications of MOX gas sensor) [1]
The modern metal oxide (MOX) sensor is a combination of several factors – a microhotplate, MOX gas sensitive layer and a package [1]
Last decades MOX gas sensors development there is a concentration of efforts, in the field of technologies allowing obtaining a cheap product for mass applications in the manner of indoor air quality (IAQ) monitoring
Summary
The modern MOX sensor is a combination of several factors – a microhotplate (responsible for power consumption and temperature operation mode), MOX gas sensitive layer (responsible for sensitivity to target gases) and a package (responsible for the possible applications of MOX gas sensor) [1]. Technological solutions that make it possible to obtain a sensor with satisfactory characteristics for such application consist in the use of a combination of silicon MEMS microhotplate [2,3,4,5,6] and plastic [2,3], metal-plastic [4] or metal-ceramic [5, 6] SMD package. What need to do scientific groups which, at the moment there is no market or market still small for the return of investment in silicon MEMS technology and the production of specialized plastic or ceramic SMD package? As a technology for manufacturing ceramic MEMS MOX sensor and SMD package for one, we propose to use combination of laser micromilling monolithic Al2O3 commercially available ceramics and screen-print/jet (aerosol) printing technologies to form platinum metallization on MEMS and package
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