Abstract
A new Fabry–Perot (FP) microcavity structure with a novel, single and deeply corrugated diaphragm (SDCD) is presented for use as a pressure-sensing element. Both the zero-pressure offset due to the non-planar diaphragm structure and the signal averaging effect caused by the non-planar deflection of the diaphragm in response to an external pressure load are studied. The FP microcavity was fabricated on a single-chip using both surface and bulk micromachining techniques. The theoretical analyses as well as the measurements have shown that the signal-averaging effect can substantially be reduced for the proposed FP microcavity pressure sensor by using the flatness-enhancing diaphragm structure.
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