Abstract
To improve the performance of infrared (IR) detectors, a novel air Fabry-Perot (FP) microcavity with high IR absorption has been studied. Based on the theory of FP cavity, the model of air FP microcavity has been proposed. Its materials have been selected through optical simulation and experimental verification. Then, the optical property and structural stress of the FP cavity have been simulated by finite difference time domain method and finite-element method. In the experiment, the test structure of air FP cavity is fabricated to verify the theoretical results. According to the experimental results, the IR absorption of this structure can reach to 85%. In addition, the application of the air FP microcavity can improve the performance of IR detector obviously.
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