Abstract
This paper describes an air Fabry-Perot (FP) cavity which is used in the infrared (IR) detector. When the distance of the FP cavity is wavelength-sized, it can store photons for almost a millisecond while they bounce up and down between the mirrors. Compared with another filled material, the air cavity not only gets high IR absorption when the cavity thickness is quarter wavelength, but also has much smaller thermal capacity and thermal time, which can improve the responsivity and detectivity of the IR detectors. An air FP cavity has been fabricated, with a thick metal mirror at bottom and a special sandwich film in the top served as absorption layer and semitransparent reflector. The materials and thickness are tested to optimize the absorption. According to the results, the best structure has been obtained, and the test results show that the IR absorption of this structure can reach to 85%.
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