A NOVEL MEMS FABRY-PEROT MICROCAVITY STRUCTURE FOR PRESSURE SENSING APPLICATION

Abstract

A new Fabry-Perot (FP) microcavity structure with a novel single deeply corrugated diaphragm (SDCD) is presented for use in pressure sensing. The mechanical behavior of the SDCD structure, as well as the key design parameters involved in the proposed FP microcavity to be better realized as a pressure sensor are simulated numerically and studied analytically. The FP microcavity is fabricated on a single-chip using both surface and bulk micromachining techniques. The preliminary characteristics of the FP microcavity show encouraging results.