Pentacene devices and logic gates fabricated by organic vapor phase deposition

Abstract

An organic vapor phase deposition (OVPD) tool has been developed and optimized for the deposition of pentacene thin films. Pentacene is grown with a good thickness uniformity, a good material consumption efficiency, and deposition rates up to 9.5Å∕s. Top-contact transistors based on OVPD-grown pentacene show high mobilities (up to 1.35cm2∕Vs) and excellent characteristics, even at high deposition rates. Elementary circuit blocks have also been produced using an OVPD-deposited pentacene film. A five-stage ring oscillator features a stage delay of 2.7μs at a supply voltage of 22V.