Abstract
An organic vapor phase deposition (OVPD) tool has been developed and optimized for the deposition of pentacene thin films. Pentacene is grown with a good thickness uniformity, a good material consumption efficiency, and deposition rates up to 9.5Å∕s. Top-contact transistors based on OVPD-grown pentacene show high mobilities (up to 1.35cm2∕Vs) and excellent characteristics, even at high deposition rates. Elementary circuit blocks have also been produced using an OVPD-deposited pentacene film. A five-stage ring oscillator features a stage delay of 2.7μs at a supply voltage of 22V.
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