50.4: First Hybrid OLED by Organic Vapor Phase Deposition and Its Advantages in Deposition Rate Control for OLED Manufacturing

Abstract

AbstractWe are discussing the latest results in the field of Organic Vapor Phase Deposition (OVPD) on basis of our experimental data. In particular the use of carrier gas and its controlled mass flow are adding an additional parameter to control deposition rates in OLED manufacturing by OVPD. Many advantages offered by this key parameter in this technology like stable deposition rates, wide range of adjustable deposition rates and doping concentrations are discussed.A small molecule hybrid OLED (SM‐HLED) consisting of a polymer layer of PEDT:PSS and two small molecule layers of α‐NPD and Alq3 was fabricated by OVPD. For this 3‐layer device we observed a turn on voltage of 2.5 V, a luminance brightness of 100 cd/m2 at 5.2 V and 300 cd/m2 at 6.5 V. Furthermore a passive matrix OLED‐display (PMOLED‐display) was demonstrated by OVPD. The display had a turn‐on voltage of about 3.0 V and showed a very homogeneous light emission.These device characteristics confirm that OVPD is close to be comparable to Vacuum Thermal Evaporation (VTE).