Abstract
Numerical Modeling of the Droplet Vaporization for Design and Operation of Liquid‐pulsed CVD
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https://doi.org/10.1002/cvde.201571015
Copy DOIJournal: Chemical Vapor Deposition | Publication Date: Dec 1, 2015 |
Numerical Modeling of the Droplet Vaporization for Design and Operation of Liquid‐pulsed CVD
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