Abstract
Chemical Vapor DepositionVolume 21, Issue 10-11-12 p. 334-334 Frontispiece Chem. Vap. Deposition (10–11–12/2015) First published: 17 December 2015 https://doi.org/10.1002/cvde.201571014AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Graphical Abstract Metal-organic CVD of Y2O3 Thin Films using Yttrium tris-amidinates By S. Karle, V.-S. Dang, M. Prenzel, D. Rogalla, H.-W. Becker, A. Devi Volume21, Issue10-11-12December 2015Pages 334-334 RelatedInformation
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