Abstract
Pure and antimony doped tin oxide thin films were deposited on glass and quartz plates by spray pyrolysis method. Structural, electrical and optical properties of these films were studied by varying the substrate temperature and antimony concentration. The best electro-optic properties obtained were, resistivity as low as 9×10 −4 Ω cm and average transmission of 80% in the visible region, at the substrate temperature of 400°C with the antimony concentration of 9 at%. While doping, change in preferred orientation was observed from [1 1 0] to [2 0 0]. The optical investigation showed that, depending upon the doping concentration, the antimony doped films had direct allowed transitions in the range 4.13–4.22 eV and indirect allowed transitions in the range 2.54–2.65 eV.
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