Studies on pyrolytically sprayed SnO2 and Sb-SnO2 thin films for LPG sensor applications

Abstract

Undoped and antimony doped tin oxide thin films of different thicknesses were prepared on mineral glass substrate by spray pyrolysis method via sol-gel route. Both the films show good transmittance in the visible region. Band gap energy of both films lies between 3 to 3.5 eV. X-ray diffraction studies of undoped and antimony doped tin oxide thin films for various annealing temperature show polycrystalline tetragonal structure of SnO2 with preferred orientation of (110) and (101), respectively and from the XRD data, grain size were also evaluated. AFM images of Undoped and antimony doped tin oxide thin films annealed at 375 °C depict the film thickness and indicate uniform surface pattern without dark pits and with strains of some ups exceeding the specified limit. The prepared films were tested in a specially developed test rig for Liquefied Petroleum Gas detection at different operating temperatures. The response characteristics of the films for LPG detection show maximum sensitivity and minimum response time at the operating temperature 400 °C. Studies indicate that antimony doped tin oxide thin film are one among the suitable candidates for LPG detection with a detection sensitivity and response time (t90) of 11 and 140 seconds, respectively.