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https://doi.org/10.1088/1757-899x/919/2/022006
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Cite Publication Date: Sep 1, 2020 | |
 License type: cc-by |
Affiliation: Karshi State University
In this work, the structure and properties of heteroepitaxial and multilayer thin film systems obtained by thermal diffusion, MBE, and ion implantation have been comprehensively studied created.
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