Abstract
The structural properties of ferroelectric films of barium titanate-stannate on the sapphire substrates and the microwave characteristics of planar capacitors on their base are investigated. It was found that the composition of the gas ambient during the deposition of the film has a significant effect on the crystal structure, the phase composition of the films and their electrical characteristics. A low level of dielectric loss of planar capacitors with high tunability based on films of barium titanate stannate in the frequency range of 2-60 GHz was demonstrated.
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