Abstract
The structural properties of strontium titanate SrTiO3 films and the electrical parameters of the related capacitor structures have been investigated. It has been found that the deposition temperature exerts a direct effect on the structure properties of the films. The strontium titanate films deposited at a temperature of 800°C are single-phase, have a rather perfect crystal structure, and possess minimum internal stresses. It has been shown that the capacitor structures based on high structure quality strontium titanate films provide better electrical characteristics, i.e. level of dielectric losses and fast switching factor at a frequency of 2 GHz.
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