Vapor Phase Deposition Research Articles

Facile fabrication of W18O49/PEDOT:PSS/ITO-PET flexible electrochromic films by atomizing spray deposition

Electrochromic smart devices with tunable optical properties are on the verge of replacing the conventional windows and curtains. The preparation and commercialization of electrochromic materials are majorly based on vapor phase deposition which is limited by high price and difficult production processes. Here, atomizing spray deposition process is developed for the production of large area, low-cost electrochromic film. W18O49, a promising inorganic EC material, was used to prepare EC film on indium tin oxide-polyethylene terephthalate (ITO-PET) flexible substrate. Poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS) was also printed on ITO-PET substrate to improve the conductivity of substrate and the adhesion between W18O49 and substrate. The experimental results showed that the transmittance modulation (ΔT) of W18O49/PEDOT:PSS/ITO-PET flexible EC film was 63.34% corresponding to a wavelength of 633 nm. The coloring and bleaching response times of W18O49/PEDOT:PSS/ITO-PET EC film were 18.7 s and 23.2 s, respectively. Furthermore, the as-prepared flexible EC film by atomizing spray deposition method had excellent cyclic stability, and the optical transmittance of the film still retains a high value (70%) after continuous coloring and bleaching for 6000 s.

Biomimetic surfaces prepared by soft lithography and vapour deposition for hydrophobic and antibacterial performance

ABSTRACT This study demonstrates the synthesis of a bioinspired surface exhibiting hydrophobic and antibacterial functionalities using a two-stage synthesis approach which involves soft lithography and initiated chemical vapour deposition (iCVD). Sandpapers, which are inexpensive and available with desired grit size, were used as the moulds in soft lithography to transfer the rough surface patterns to the PDMS replica surfaces. The antibacterial surface modification of the PDMS replicas was done through vapour-phase deposition of thin poly(diethylaminoethyl methacrylate-vinylbenzyl chloride) (P(DEAEMA-VBC)) films by iCVD method from the corresponding monomers. FTIR analysis of the as-deposited films showed a high retention of the chemical functionalities. The hydrophobicity and antibacterial performances of the flat and rough surfaces were examined as a function of surface roughness. The antibacterial activities were tested against gram-negative E. coli and gram-positive S. aureus. It was found that obtained replicas achieved up to a 7-log reduction in bacterial population and showed high hydrophobicity.

Rational Development of Guanidinate and Amidinate Based Cerium and Ytterbium Complexes as Atomic Layer Deposition Precursors: Synthesis, Modeling, and Application.

Owing to the limited availability of suitable precursors for vapor phase deposition of rare‐earth containing thin‐film materials, new or improved precursors are sought after. In this study, we explored new precursors for atomic layer deposition (ALD) of cerium (Ce) and ytterbium (Yb) containing thin films. A series of homoleptic tris‐guanidinate and tris‐amidinate complexes of cerium (Ce) and ytterbium (Yb) were synthesized and thoroughly characterized. The C‐substituents on the N‐C‐N backbone (Me, NMe2, NEt2, where Me=methyl, Et=ethyl) and the N‐substituents from symmetrical iso‐propyl (iPr) to asymmetrical tertiary‐butyl (tBu) and Et were systematically varied to study the influence of the substituents on the physicochemical properties of the resulting compounds. Single crystal structures of [Ce(dpdmg)3] 1 and [Yb(dpdmg)3] 6 (dpdmg=N,N'‐diisopropyl‐2‐dimethylamido‐guanidinate) highlight a monomeric nature in the solid‐state with a distorted trigonal prismatic geometry. The thermogravimetric analysis shows that the complexes are volatile and emphasize that increasing asymmetry in the complexes lowers their melting points while reducing their thermal stability. Density functional theory (DFT) was used to study the reactivity of amidinates and guanidinates of Ce and Yb complexes towards oxygen (O2) and water (H2O). Signified by the DFT calculations, the guanidinates show an increased reactivity toward water compared to the amidinate complexes. Furthermore, the Ce complexes are more reactive compared to the Yb complexes, indicating even a reactivity towards oxygen potentially exploitable for ALD purposes. As a representative precursor, the highly reactive [Ce(dpdmg)3] 1 was used for proof‐of‐principle ALD depositions of CeO2 thin films using water as co‐reactant. The self‐limited ALD growth process could be confirmed at 160 °C with polycrystalline cubic CeO2 films formed on Si(100) substrates. This study confirms that moving towards nitrogen‐coordinated rare‐earth complexes bearing the guanidinate and amidinate ligands can indeed be very appealing in terms of new precursors for ALD of rare earth based materials.

Optimal design of novel precursor materials for the atomic layer deposition using computer-aided molecular design

Nanomaterials and nanostructures with multi-functional properties found widespread applications such as electronics, optics, and coatings that can be fabricated using Atomic Layer Deposition (ALD). ALD is a vapor phase deposition technique to generate thin films of metals and metal oxides on a substrate. In this process, a precursor, which often comprises of organic functional groups that surround the depositing metal, chemisorbs on the substrate or reacts with the surface sites and with each other. Precursor chemisorption on the substrate leads ALD to be a self-limiting process. Thus, the precursor(s) should be chosen in a way to enhance deposition based on the ALD conditions. For a given application, it is practically impossible to carry out a large number of experiments using numerous precursors with varied deposition conditions to find the one that maximizes the growth rate in ALD. In addition, only existing precursors can be tested experimentally. The overall objective of this work is to develop a computational tool for the in-silico design of precursor materials using adsorbate solid solution theory (ASST). In the first part of this paper, we apply the ASST to derive properties of the functional groups present in the precursor using a new Group Contribution Method (GCM). The GCM is successfully derived and compared with the experimental data from ALD. The method shows good agreement and is useful for the design of novel materials. In the second part of this paper, using the thermodynamic properties as obtained from GCM, we develop a computer-aided molecular design (CAMD) framework for the optimal design of novel precursor materials with enhanced deposition properties for the ALD of metal oxides and metals. The metaheuristic efficient ant colony optimization algorithm (EACO) developed in-house is used for both parts. CAMD is a combinatorial optimization methodology, where molecules with optimal desired properties are generated from functional groups. The precursor selection optimization problem is posed as a mixed integer nonlinear programming problem, which is solved using EACO. The ALD growth kinetics is used as an objective of optimization and a solution is validated with thermodynamic constraints. Along with the number of groups, the temperature is also included in the optimization framework as decision variables. Forty-one novel titanium precursor molecular structures for ALD are generated with growth rates ranging from 1.23 Å/cycle to as high as 1.65 Å/cycle. Thus, these precursors have shown growth rates higher than the known titanium precursors. ALD growth rate is found to be a function of the combination of the precursor functional groups as well as temperature with a complex correlation among them.

Modified vapor phase deposition technology for high-performance uncooled MIR PbSe detectors.

The low performance of middle infrared (MIR) PbSe detectors fabricated from vapor phase deposition (VPD) technology restricts the rapid development of VPD technology and detector commercialization. A modified VPD process was proposed to duplicate the microstructural features of high-performance CBD-PbSe detectors for a breakthrough in the VPD technology. A peak detectivity D* of 1.6 × 1010 cm Hz1/2 W−1 at 298 K was achieved under the optimized sensitization, approaching the best performance of CBD-PbSe detectors. Through the contrasting various microstructures obtained from diverse methods, the nanoparticle self-assembly structure in VPD-PbSe oriented rod-like crystals is an important factor for the IR sensitivity. The microstructural evolution demonstrated that there is a large space to grow for VPD-PbSe detectivity D* via eliminating the voids formed in the iodine-sensitization process. The increased performance indicates that the modified VPD technology can provide technical support for the manufacturing of the megapixel uncooled lead-salt FPA imager and accelerate its industrialization.

Підвищення довговічності турбокомпресора в внаслідок ремонтного впливу

A turbocharger is a unit of modern internal combustion engines designed to boost it. Since a drive of the turbocharger is most often carried out from the energy of the exhaust gases, the conditions of its operation can not be called favorable: the temperature of the exhaust gases sometimes reaches 7000C, high chemical activity of the exhaust gases, high speed of rotation of the turbine. The consequence of difficult operating conditions is the wear of its elements. One of the main causes of wear of the active elements of the turbocharger is abrasive wear. Various methods of restoration and strengthening can be used to restore machine parts. However, not all methods can provide the necessary resource for the restoration and strengthening of parts working in abrasive and corrosive environments. One of the modern directions of increasing the wear resistance and other properties of reducing coatings is the use of composite materials. This article presents the results of research on the development of a new method for restoring and strengthening parts with composite materials based on the use of chemical vapor deposition of metals CVD - method (Chemicikal Vapor Deposition) by decomposition of organometallic compounds. It is shown that the developed composite material obtained by the CVD-method of decomposition of organometallic compounds provides an increase in wear resistance of at least 2.0...2.2 times in comparison with new parts composite material. Vapor-phase deposition of metals, Chemicikal Vapor Deposition-method, decomposition of organometallic compounds.

From thin films to shaped platelets: effects of temperature gradient on SnS synthesis

In this work, we studied the synthesis and properties of SnS thin films and platelets obtained by vapor phase deposition under controlled pressure. Two morphological types are obtained in the same process depending on the absolute temperature and the temperature gradient inside the reactor. The growth of isolated platelets is favored by a small temperature gradient between the sublimation and deposition regions of the deposition chamber. Films are formed when there is a large temperature gradient. Raman spectroscopy and energy dispersive spectroscopy analysis were used to identify the phase of the synthesized samples, and polarized Raman spectroscopy and X-ray diffraction analysis helped us confirm the crystallographic orientation of the isolated platelets. We have carried out studies on the crystallographic shape and orientation of orthorhombic isolated platelets using optical microscopy, scanning electron microscopy and surface energies of the crystalline planes of SnS.

Ternary-source vapor-phase deposition of CH3NH3PbI3 polycrystalline thin films using CH3NH2 and HI gas sources with PbI2 solid source

We have investigated reaction processes of vacuum deposition of CH3NH3PbI3 using CH3NH3I and PbI2 solid sources. CH3NH3I decomposes to CH3NH2 and HI at around 100 °C under usual vacuum deposition conditions. Therefore, CH3NH3I solid source can be replaced with CH3NH2 and HI gas sources. We have demonstrated that high-quality CH3NH3PbI3 polycrystalline thin films can be fabricated by ternary-source vacuum deposition using CH3NH2 and HI gas sources combined with PbI2 solid source. The newly developed ternary-source vapor-phase deposition technique is useful because of its high stability and controllability in deposition rates.

Heat Dissipation in Flexible Nitride Nanowire Light-Emitting Diodes.

We analyze the thermal behavior of a flexible nanowire (NW) light-emitting diode (LED) operated under different injection conditions. The LED is based on metal–organic vapor-phase deposition (MOCVD)-grown self-assembled InGaN/GaN NWs in a polydimethylsiloxane (PDMS) matrix. Despite the poor thermal conductivity of the polymer, active nitride NWs effectively dissipate heat to the substrate. Therefore, the flexible LED mounted on a copper heat sink can operate under high injection without significant overheating, while the device mounted on a plastic holder showed a 25% higher temperature for the same injected current. The efficiency of the heat dissipation by nitride NWs was further confirmed with finite-element modeling of the temperature distribution in a NW/polymer composite membrane.

Aerosol dynamics simulations of the anatomical variability of e-cigarette particle and vapor deposition in a stochastic lung

Electronic cigarette (EC) aerosols are typically composed of a mixture of nicotine, glycerine (VG), propylene glycol (PG), water, acidic stabilizers and a variety of flavors. Inhalation of e-cigarette aerosols is characterized by a continuous modification of particle diameters, concentrations, composition and phase changes, and smoker-specific inhalation conditions, i.e. puffing, mouth-hold and bolus inhalation. The dynamic changes of inhaled e-cigarette droplets in the lungs due to coagulation, conductive heat and diffusive heat/convective vapor transport and particle phase chemistry are described by the Aerosol Dynamics in Containment (ADiC) model. For the simulation of the variability of inhaled particle and vapor deposition, the ADiC model is coupled with the IDEAL Monte Carlo code, which is based on a stochastic, asymmetric airway model of the human lung. We refer to the coupled model as “IDEAL/ADIC_v1.0”. In this study, two different e-cigarettes were compared, one without any acid (“no acid”) and the other one with an acidic regulator (benzoic acid) to establish an initial pH level of about 7 (“lower pH”). Corresponding deposition patterns among human airways comprise total and compound-specific number and mass deposition fractions, distinguishing between inhalation and exhalation phases and condensed and vapor phases. Note that the inhaled EC aerosol is significantly modified in the oral cavity prior to inhalation into the lungs. Computed deposition fractions demonstrate that total particle mass is preferentially deposited in the alveolar region of the lung during inhalation. While nicotine deposits prevalently in the condensed phase for the “lower pH” case, vapor phase deposition is dominating the “no acid” case. The significant statistical fluctuations of the particle and vapor deposition patterns illustrate the inherent anatomical variability of the human lung structure.

On thermal stability of cryovacuum deposited CH4+H2O films

Whereas stable homogenous states of aqueous hydrocarbon solutions are typically observed at high temperatures and pressures far beyond the critical values corresponding to individual components, the stability of such system may be preserved upon transition into the region of metastable states at low temperatures and low pressures. This work is dedicated to the study of the thermal stability of a water-methane mixture formed by cryogenic vapor phase deposition. The obtained thin films were studied using vibrational spectroscopy in the temperature range of 16–180 K. During thermal annealing of the samples, characteristic vibrational C–H modes of methane were monitored alongside the chamber pressure to register both structural changes and desorption of the film material. The obtained results reveal that upon the co-deposition of methane and water, methane molecules appear both in non-bound and trapped states. The observed broadening of the characteristic C–H stretching mode at 3010 cm−1 upon an increase in temperature of the sample from 16 to 90 K, followed by narrowing of the peak as the temperature is reduced back to 16 K, indicates localization of methane molecules within the water matrix at lower temperatures.

Role of Buffer Layer and Building Unit in the Monolayer CrI3 Growth: A First-Principles Perspective.

CrI3, a two-dimensional layered material, has recently attracted a lot of research interest due to its exotic magnetic property. However, the synthesis of a CrI3 monolayer (ML) by vapor-phase deposition has not been achieved by current experimental endeavors, which require a better understanding of the vapor-phase growth mechanism involved. In this study, we theoretically simulate the growth of the CrI3 ML on the Si(111) surface by using a first-principles calculation. Our key finding is that an iodine buffer layer on the Si surface is crucial to the formation of the CrI3 ML by stabilizing the precursor and also reacting with the precursor. Moreover, our simulation reveals that the CrI2 cluster as the growth building unit, which can be formed by controlling the chemical potential of the I source, is preferred for the formation of CrI3 ML. We think that our work will provide insightful guidance for the experimental synthesis of CrI3 ML in the future.

Comparative Study on the Adsorption Capacities of the Three Black Phosphorus-Based Materials for Methylene Blue in Water

Dye effluent has attracted considerable attention from worldwide researchers due to its harm and toxicity in recent years; as a result, the treatment for dye has become one of the focuses in the environmental field. Adsorption has been widely applied in water treatment owing to its various advantages. However, the adsorption behaviors of the new materials, such as the 2D black phosphorus (BP), for pollution were urgently revealed and improved. In this work, BP, black phosphorene (BPR), and sulfonated BPR (BPRS) were prepared by the vapor phase deposition method, liquid-phase exfoliating method, and modification with sulfonation, respectively. The three BP-based materials were characterized and used as adsorbents for the removal of methylene blue (MB) in water. The results showed that the specific surface areas (SSAs) of BP, BPR, and BPRS were only 6.78, 6.92, and 7.72 m2·g−1, respectively. However, the maximum adsorption capacities of BP, BPR, and BPRS for MB could reach up to 84.03, 91.74, and 140.85 mg·g−1, which were higher than other reported materials with large SSAs such as graphene (GP), nanosheet/magnetite, and reduced graphene oxide (rGO). In the process of BP adsorbing MB, wrinkles were generated, and the wrinkles would further induce adsorption. BPR had fewer layers (3–5), more wrinkles, and stronger adsorption capacity (91.74 mg·g−1). The interactions between the BP-based materials and MB might cause the BP-based materials to deform, i.e., to form wrinkles, thereby creating new adsorption sites between layers, and then further inducing adsorption. Although the wrinkles had a certain promotion effect, the adsorption capacity was limited, so the sulfonic acid functional group was introduced to modify BPR to increase its adsorption sites and promote the adsorption effect. These findings could provide a new viewpoint and insight on the adsorption behavior and potential application of the BP-based materials.

Fast Organic Vapor Phase Deposition of Thin Films in Light-Emitting Diodes.

Fast deposition of thin films is essential for achieving low-cost, high-throughput phosphorescent organic light-emitting diode (PHOLED) production. In this work, we demonstrate rapid and uniform growth of semiconductor thin films by organic vapor phase deposition (OVPD). A green PHOLED comprising an emission layer (EML) grown at 50 Å/s with bis[2-(2-pyridinyl-N)phenyl-C](acetylacetonato)iridium(III) (Ir(ppy)2(acac)) doped into 4,4'-bis(N-carbazolyl)-1,1'-biphenyl (CBP) exhibits a maximum external quantum efficiency of 20 ± 1%. The morphology, charge transport properties, and radiative efficiency under optical and electrical excitation of the PHOLED EML are investigated as functions of the deposition rate via both experimental and theoretical approaches. The EML shows no evidence for gas phase nucleation of the organic molecules at deposition rates as high as 50 Å/s. However, the roll-off in quantum efficiency at high current progressively increases with deposition rate due to enhanced triplet-polaron annihilation. The roll-off results from accumulation of stress within the PHOLED EML that generates a high density of defect states. The defects, in turn, act as recombination sites for triplets and hole polarons, leading to enhanced triplet-polaron annihilation at high current. We introduce a void nucleation model to describe the film morphology evolution that is observed using electron microscopy.

Multi-Stage Organic Logic Circuits Using Via-Hole-Less Metal Interconnects

Multi-metal interconnection is a crucial technology for the development of large-scale integrated circuits (ICs). However, organic semiconductors are not robust enough to be compatible with conventional lithography-and-etching-based via-forming methods. Thus, an alternative metal interconnect method is required for successful organic IC implementation. In-situ patterning of a dielectric polymer through a shadow mask while depositing in vapor phase possibly addresses the issues in both solvent susceptibility and process complexity. Here we report multi-stage organic logic circuits with a multi-level metal interconnection scheme based on patterned interlayer dielectrics via vapor phase deposition. We implement an exclusive OR circuit composed of four 2-input NAND gates and three-level metal interconnections to demonstrate the potential of the proposed solvent-free metal interconnection scheme.

Study on Structural and Thermal Characteristics of Heteroleptic Yttrium Complexes as Potential Precursors for Vapor Phase Deposition

Yttrium oxide (Y2O3) thin films are implemented as a functional component in a broad field of applications such as optics, electronics or thermal barrier coatings. Atomic layer deposition (ALD) is a promising technique to fabricate high‐quality thin films with atomic level precision in which the precursor choice plays a crucial role in process development. The limited number of suitable yttrium precursors available for ALD of Y2O3 has triggered increasing research activity seeking new or modified precursors. In this study, heteroleptic compounds of yttrium bearing the cyclopentadienyl (Cp) ligand in combination with the chelating amidinate or guanidinate ligands were targeted as potential precursors for ALD. In this context, a systematic and comparative study of the structure and thermal characteristics of (bis‐cyclopentadienyl‐(N,N'‐diisopropyl‐2‐methyl‐amidinato)yttrium) [YCp2(dpamd)] 1 and (bis‐cyclopentadienyl‐(N,N'‐diisopropyl‐2‐dimethylamido‐guanidinato)yttrium) [YCp2(dpdmg)] 2 was performed. Complementary characterization tools such as 1H‐NMR, elemental analysis, electron‐impact mass spectrometry (EI‐MS) and single‐crystal X‐ray diffraction (XRD) confirmed the spectroscopic purity and the monomeric nature of the metalorganic compounds. Hirshfeld surface analysis revealed influence of the ligand choice on the intermolecular interactions of the compounds. The important figures of merit for a precursor, namely the thermal properties were investigated via thermogravimetric analysis. Thus, the volatility, transport behavior and thermal stability were examined and compared to their homoleptic counterparts [YCp3], [Y(dpamd)3] or [Y(dpdmg)3].

Parylene-Based Porous Scaffold with Functionalized Encapsulation of Platelet-Rich Plasma and Living Stem Cells for Tissue Engineering Applications.

A scaffold was fabricated to synergistically encapsulate living human adipose-derived stem cells (hASCs) and platelet-rich plasma (PRP) based on a vapor-phase sublimation and deposition process. During the process, ice templates were prepared using sterile water as the solvent and were used to accommodate the sensitive living cells and PRP molecules. Under controlled processing conditions, the ice templates underwent vapor sublimation to evaporate water molecules, while at the same time, vapor-phase deposition of poly-p-xylylene (Parylene, USP Class VI highly biocompatible) occurred to replace the templates, and the final construction yielded a scaffold with Parylene as the matrix, with simultaneously encapsulated living hASCs and PRP molecules. Evaluation of the fabricated synergistic scaffold for the proliferation activities toward the encapsulated hASCs indicated significant augmentation of cell proliferation contributed by the PRP ingredients. In addition, osteogenic activity in the early stage by alkaline phosphatase expression and later stage with calcium mineralization indicated significant enhancement toward osteogenetic differentiation of the encapsulated hASCs, which were guided by the PRP molecules. By contrast, examinations of adipogenic activity by lipid droplet formation revealed an inhibition of adipogenesis with decreased intracellular lipid accumulation, and a statistically significant downregulation of adipogenic differentiation was postulated for the scaffold products when compared to the osteogenetic results and the control experiments. The reported fabrication method featured a clean and simple process to construct scaffolds that combined delicate living hASCs and PRP molecules inside the structure. The resultant synergistic scaffold and the selected commercially available hASCs and PRP are emerging as tissue engineering tools that provide multifunctionality for tissue repair and regeneration.

Two-Step Approach for Conformal Chemical Vapor-Phase Deposition of Ultra-Thin Conductive Silver Films.

Conductive ultra-thin silver films are commonly fabricated by physical vapor deposition methods such as evaporation or sputtering. The line-of-sight geometry of these techniques impedes the conformal growth on substrates with complex morphology. In order to overcome this issue, volume deposition technologies such as chemical vapor deposition or atomic layer deposition are usually preferred. However, the silver films fabricated using these methods are generally non-electrically conductive for thicknesses below 20-50 nm due to island formation. Here, we demonstrate a novel approach for producing ultra-thin conductive silver layers on complex substrates. Relying on chemical vapor-phase deposition and plasma post-treatment, this two-step technique allows the synthesis of highly conductive and uniform silver films with a critical thickness lower than 15 nm and a sheet resistance of 1.6 Ω/□ for a 40 nm-thin film, corresponding to a resistivity of 6.4 μΩ·cm. The high infrared reflectance further demonstrates the optical quality of the films, despite a still large root-mean-square roughness of 8.9 nm. We successfully demonstrate the highly conformal deposition in lateral structures with an aspect ratio of up to 100. This two-step deposition method could be extended to other metals and open new opportunities for depositing electrically conductive films in complex 3D structures.

Epitaxial Growth of Two-Dimensional Layered Transition Metal Dichalcogenides

Transition metal dichalcogenide (TMD) monolayers and heterostructures have emerged as a compelling class of materials with transformative properties that may be harnessed for novel device technologies. These materials are commonly fabricated by exfoliation of flakes from bulk crystals, but wafer-scale epitaxy of single-crystal films is required to advance the field. This article reviews the fundamental aspects of epitaxial growth of van der Waals–bonded crystals specific to TMD films. The structural and electronic properties of TMD crystals are initially described along with sources and methods used for vapor phase deposition. Issues specific to TMD epitaxy are critically reviewed, including substrate properties and film-substrate orientation and bonding. The current status of TMD epitaxy on different substrate types is discussed along with characterization techniques for large-areaepitaxial films. Future directions are proposed, including developments in substrates, in situ and full-wafer characterization techniques, and heterostructure growth.

In-situ Raman analysis of hydrogenation in well-defined ultrathin molybdenum diselenide deposits synthesized through vapor phase deposition

We report on the synthesis, characterization and in-situ Raman spectroscopy analysis of hydrogenation in ultrathin crystalline MoSe2 deposits. We use a controllable vapor phase synthesis method using MoSe2 powder as the only precursor, to fabricate nano- to micro-size few layer thick MoSe2 deposits with tunable number densities on SiO2/Si substrates. We employ this controllable synthesis method to correlate characteristic Raman spectroscopy response of MoSe2 at ca. 242 cm−1 (A1g) and ca. 280 cm−1 (E2g1) with the thickness of the deposits acquired from atomic force microscopy (AFM). We also use this array of well-defined atomically thin MoSe2 deposits to study possible hydrogenation effects on select architectures using in-situ Raman spectroscopy. Interestingly, our analysis indicates that ultrathin MoSe2 deposits with exposed edges show a blue shift of 1–2 cm−1 when exposed to H2 flow at 150–250 sccm for 2–4 hours in a sealed reaction cell. Exposure to Ar flow under same condition reverses the observed shift in the A1g mode of the select MoSe2 deposits. Our measurements provide in-situ evidence for hydrogen adsorption on MoSe2 deposits at room temperature and insight into the possible active sites for hydrogen reactions on layered dichalcogenides at lower dimensions.