We have studied heat-treated (950–1300°C) 6H–SiC(0001)Si and (0001̄)C face with photoemission spectroscopy using synchrotron radiation (SR-PES) and low energy electron diffraction (LEED). We observed LEED patterns of SiC 1×1, 3 × 3 , 3 × 3 +6 3 ×6 3 and graphite 1×1 sequentially with increasing heating temperature for (0001)Si face and SiC 1×1 for (0001̄)C face, respectively. We have measured Si(2p) spectra and valence band energy distribution curves (VB-EDCs). The trend of sublimation of Si atoms from surface is different between Si- and C-face. 3 × 3 superstructure must be Si-derived. The 6 3 ×6 3 structure could be explained as a moiré pattern caused by monolayer-graphite sitting on SiC surface. Si 3s-derived state of SiC 1×1 is different between SiC 1×1 for Si- and C-face. It is suggested that a single crystal graphite layer grows on Si-face and a polycrystalline graphite is formed on C-face for heated specimens above 1150°C.
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